Single Axis Electric Actuator Series LJ1H

Consult P/A.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: J, K, T Q1 = M L2 + (3 x P) L2 + (3 x P) L2 = L1 + (3 x P) L1 = Q2 = M Q2 = M L2 = [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Symbol: A35 Symbol: A36 Symbol: A37

D. P. Lube ALD600/900 Series

P.

Electric Slide Table / High Precision Type 《 AC servo motor 》

rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308 197 385 Power consumption [W] at 20C *9 6.3 7.9

EX500-GPR1A.eng

Specification Display Item P-ch MOS-FET ( open drain ) EX9-OET1 N-ch MOS-FET ( open drain ) EX9-OET2 Specification P-ch MOS-FET ( open drain ) EX9-OEP1 EX9-OEP2 2. EX9-PE1 1. EX9-OET1/EX9-OET2/EX9-OEP1/EX9-OEP2 Settings for display PWR PWR PWR Turns on: Power is supplied from external power supply.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Table of Contents

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

R P R 26.6 22 Approx. 300 (Lead wire length) 48.8[51] L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P = 10.5 Approx. 300 (Lead wire length) 12.5 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8[51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P = 10.5 12.5 4.5 41.5[48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5[48.5] (Pitch) P = 10.5 13.5 M3

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

Hydraulic

Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

ZP

P Applicable tubing O.D.

5 Port Solenoid Valve SY Series

Combination of different fittings is possible. + + + + P EB EA Type 20P SY3 20 SY5 20 SY7 20 Bar stock type Flat ribbon cable P. 47 Body ported Base mounted A 26 pins MIL connector permits One-touch wiring of external cables in a bundle. P EB EA In common Type 23 Stacking type Individual wiring SY9 20 + + + + P. 43 EA P EB Manifold stations can be increased.

Precision Cylinder Series MTS

MT-S16 16 Weights MT-S20 20 (g) MT-S25 25 End lock additional weight 50 157 222 400 547 1,000 1,533 Standard stroke (mm) MT-S32 32 Model 200 699 912 1,495 2,208 25 52 138 186 350 487 918 1,420 175 649 851 1,412 2,095 5 36 150 599 790 1,330 1,983 10 40 125 549 729 1,247 1,870 15 44 100 194 294 500 669 1,165 1,758 20 48 75 175 258 450 608 1,083 1,645 30 56 MT-S40 40 MTS8 MTS12 MTS16 MTS20