3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

XM, XY

10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

CS1

Eliminate the unnecessary parts. 1.10-13 Series CS1 Front Flange/CS1F Lube (CS1F), Non-lube (CS1FN), AIr-hydro (CS1FH) Long stroke With auto switch/CDS1F (mm) Stroke range (mm) W/o rod boot With rod boot Style Bore (mm) J FT FX FD S AL B E F FA KA M MM H A D EA FY FZ G K N P B C h ZZ e f l ZZ1 125 140 160 180 200 250 300 115 1/2 M30 X 1.5 145 75 40 145 190 100 230 M14 X 1.5 110 238 133 261

Square Tube Type Air Cylinder Series MB1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

CXS

0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9 2-M5 x 0.8 45 25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132

Modular Type Filter Regulator Series AW

IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

0.4

Note 2) A combination of Function N (Negative common) and E is unavailable. Since E has no polarity, it can also be used as a negative common.

CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

Compact Cylinder with Lock Series CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

Vacuum Unit

Pressure sensor assembly: 3 m (With lead wire) Note Centralized wiring specification (Plug-in) Individual wiring specification: 300 mm (Connector assembly)4 Symbol C V None V Cannot be selected when e is N C1 V None None Cannot be selected when e is P or T L None V V Cannot be selected when e is N L1 None None V L2 None V None Cannot be selected when e is P or T L3 None None None 4 For the

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 (n 2) 2 100 + 100 Same side 100 + 100 (n 2) n = 4, 6, 8 n = 2, 3, 4 1 pc. 75 90 80 10 Different sides 35 75 90 80 Same side 55 75 90 80 90 + 30 (n 2) 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n

7

Note2) The standard strokes of CKG1 are 50, 75, 100, 125 and 150 mm.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

Prevents Micro-Bubbles

S) C 2-Q Breathing port: R H G SMC SMC SMC SMC N V 1/4 1/4 1/4 U 3/8 E Pitch = B Dimensions (mm) Station n-A port 2 3 4 5 Model Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 LLC2A 75 106 137 168 146 177 208 239 73 109.5 146 182.5 LLC3A 84 120.5 157 193.5 183 219.5 256 292.5 (mm) Dimensions 94 141 188 235 A B Q C D E G H K N R S U V W Y LLC4A Model LLC2A LLC3A LLC4A LLC5A 109 156

Table of Contents

1 e !

MLGP

236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) 42 60 X YY YL Z st 25 st 50 50 < st 100 25 < st 100 100 < st 200 200 < st 300 300 < st 350 100 124 80 100 M14 x 2.0 24 28 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 Dimensions A, DB, E: MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 158 188.5 185 213.5 Bore size (mm) 152.5 173 198.5 DB