Brake mechanism added

n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 90 + 50 (n = 4, 8, 12, 16, ) Note 2) (n 4) 2 D-B59W 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 15 90 100 110 Note 1) When n is an

IDU/IDF

E Q P N M L K J I H G F D C B A Port size Model 71 50 90 700 700 600 356 328 398 219 642 63 445 70 1235 1155 750 300 R 1 IDU22C1/22C 112 50 90 780 776 680 416 388 463 269 722 68 550 136 1350 1260 830 360 R 1 1/2 IDU37C1/37C 87 50 95 800 800 700 461 433 508 267 722 68 530 155 1440 1340 850 405 R 2 IDU55C 87 50 95 800 800 700 481 453 528 317 722 68 530 220 1575 1475 850 425 R 2 IDU75C : Power

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

x 1 Rc(PT)1/8 20 to 50 8 tube Ball joint rotation 15 Buffer Specifications 20 to 50 10 to 16 Pad diameter (mm) M14 x 1 M10 x 1 Mounting 10, 20, 30, 50 10, 20, 30, 40, 50 Stroke (mm) 0 stroke 0 stroke 1.0N {0.10kgf} 2.0N {0.20kgf} Spring reactive force Stroke end Stroke end 3.0N {0.31kgf} 5.0N {0.51kgf} Without detent (J), With detent (K) Detent specifications Weight Table (g) Vacuum entry

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

154 24 16 7 19 88 32 With rod boot h l Symbol f e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 12.5 81 93 106 131 156 25 37.5 50 75 100 68 17 35 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 17 35 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 17 35 12.5

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

SMC Pneumatic Clean Series

10-/21-CG1W63 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 20 25 32 40 50 63 80 100 100 Non-lube Double acting, Available double rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction flow rate of vacuum suction type (Reference values) Specifications

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

B J A D EA K MM TDe8 AL F KA FA M G N R TT P TX (mm) 125 140 160 180 200 250 300 1/2 90 0.050 0.089 145 115 M14 x 1.5 M30 x 1.5 170 50 47 36 59 43 15 31 14 19 16 35 98 1 50 32 25 to 1000 Lube Non-lube Air-hydro 1/2 90 0.050 0.089 161 128 M14 x 1.5 M30 x 1.5 190 50 36 59 15 47 43 14 31 19 16 35 1.5 98 55 36 30 to 1000 3/4 90 0.050 0.089 182 144 M16 x 1.5 M36 x 1.5 212 18.5 56 40 59 17 53 43

•

a:1>20 . 25 I 932 >40 1>50 2T 3T 4T Response time (sec) Aclsorpti&." area (em:!)

Series VQ Base Mounted Metal Seal/Rubber Seal

Coil voltage 3 VZ 1 2(1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Pilot valve 3 position exhaust center Symbol Specification DC AC VF 3 4(1) (1.0W) (1) 4 VV5Q11-09C6FU2 VQ1100-5 VQ1200-5 VV1000-10A-1 1 set (F kit 9 station manifold base No.) 4 sets (Single solenoid No.) 4 sets (Double solenoid No.) 1 sets (Blank plate No.)

SMC

end) 30 30 76 46 73 58 FF 22.5 5H9 depth 5 +0.030 0 F 25 5H9 depth 5 +0.030 0 N 1 x F 2 51 2-M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 depth 5 +0.030 0 30 1.5 NN-M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

VZS

Electrical entry F: Plug-in type Option Port size Nil 01 Without sub-plate Rc 1 8 50 01 F Z VZS2 1 2 Plug-in 5 G 50 VZS2 Non plug-in 2 01 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil rated voltage Symbol Thread type 1 2 3 2 position single 100 VAC, 50/

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Air Cylinder Series MB

(Non-lube) 50 to 700mm/s 50 to 1000mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance Cushion Note 1) Both ends (Air cushion) JIS class 2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting Basic, Foot, Front flange, Rear flange, Mounting Single clevis, Double clevis, Center trunnion

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20Series MSQ now includes smaller sizes 1, 2, 3 and 7 11-9-1 2 Compact rotary table

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

VQ7-6/7-8

2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24