Bore Size: 16mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: 6mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: 12mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: 20mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: 25mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: 8mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: Ø32, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø25, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø63, Thread: NPT, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

tapped, Port thread type: Rc, Auto Switches: A93, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

Bore Size: 20mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

CE

Cushion (applicable bore size 40 to 63) 1pc. S 3pcs. 3 "n" pcs.

CXT

Direct mounting Wire length (1) (m) Load voltage Rail mounting Special function Style Electrical entry Wiring (Output) Indicator 32, 40 12 to 40 Applicable load 0.5 () 3 (L) 5 (Z) (N) AC DC Perpendicular In-line Perpendicular In-line 3 wire (Equivalent to NPN) A96V A96 A76H 5V IC A72H A72 200V Yes Grommet Reed switch Solid state switch A73 A73H 100V 12V A93V A93 Relay PLC 2 wire A90V

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm 40: 37mm 2 auto

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40

XLAQ/XLDQ

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

MXF

10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.