Bore Size: 40mm, Control Method: Brake, w/o Scale, Stroke: 2000mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 40mm, Control Method: Brake, w/o Scale, Stroke: 400mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 500mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 900mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 25mm, Control Method: Brake and Scale, Stroke: 100mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 32mm, Control Method: Brake and Scale, Stroke: 700mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 25mm, Control Method: Scale, w/oBrake, Stroke: 1400mm, Stroke Adjusting Unit: Left: Shock Absorber + Adjuster Bolt; Right: Shock Absorber + Adjuster Bolt , Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: 1 pc.

Bore Size: 25mm, Control Method: Scale, w/oBrake, Stroke: 1400mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: 1 pc.

Bore Size: 15mm, Stroke: 250mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 32mm, Stroke: 250mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: 15mm, Stroke: 350mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Table of Contents

Threaded type from 6A to 50A is standardized.

2

Do not use standard dew point 40C (symbol: L) type, standard dew point 60C (symbol: S) type and IDG30A, 50A, 30HA, 50HA for dehumidifying breathing air. Do not use only outlet air (dry air) in a closed room. 1. Consider the purge air flow rate. Find the purge air flow rate from the charts and calculate the required outlet air flow rate + purge air flow rate.

7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

2/3 Port Valve

Screw-in styles, 6A to 50A, are standardized.

2/3 Port Valve

) Brass or BC6, Copper Polyacetal B H X Stainless steel Note 1)15A to 25A are brass and 32A to 50A are BC6 Note 2)The highest operating temperature of 32A to 50A is 80C.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Metric size Inch size 3 SY3000 5 SY5000 7 SY7000 9 SY9000 Rc Nil 5 32" F G One-touch fitting for 4 VVQ1000-50A-C4 VVQ1000-50A-N3 One-touch fitting for SY3000 SY3000 1 4" N VVQ1000-50A-N7 One-touch fitting for 6 VVQ1000-50A-C6 NPT One-touch fitting for 5 32" NPTF T One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-51A-N3 One-touch fitting for A, B port size SJ Except for M5 1 4" One-touch

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

VXP21/22/23

Description Size Standard Brass BC6 Brass BC6 NBR Option Stainless steel Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

7.4

Applicable tube 2 VVQ0-50A-C2 Applicable tube 3.2 VVQ0-50A-C3 Applicable tube 4 VVQ0-50A-C4 Applicable tube 1/8" VVQ0-50A-N1 Applicable tube 5/32" VVQ0-50A-N3 8.5 mm pitch (One-touch fitting) PR plate Barb fitting 2 SS070-50A-20 Barb fitting 3.2 SS070-50A-32 Barb fitting 4 SS070-50A-40 * Part number is for one fitting assembly.