SMC Pneumatic Clean Series

60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

MHx-OMM0057

/ mm mm mm c.p.m. mm(L1-L2) (L1) (L2) g MHL2-10D 60 20 56 76 280 MHL2-10D1 40 78 118 345 10 40 MHL2-10D2 60 96 156 425 MHL2-16D 60 30 68 98 585 MHL2-16D1 60 110 170 795 16 40 MHL2-16D2 80 130 210 935 MHL2-20D 60 40 82 122 1,025 MHL2-20D1 80 142 222 1,495 20 40 MHL2-20D2 100 162 262 1,690 MHL2-25D 60 50 100 150 1,690 MHL2-25D1 100 182 282 2,560 25 40 MHL2-25D2 120 200 320 2,775 MHL2-32D

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

Compact Hydraulic Cylinder Series CH
KGB

CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other

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5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Bore Size: 20mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 60mm

Parallel Type Air Gripper

frequency (c.p.m.) 180 60 Lubrication Lubrication not required.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

length (m) Auto switch model Electrical entry direction Load voltage Indicator light Special function Wiring (output) Electrical entry Type 3 (L) 5 (Z) Applicable load In-line 0.5 (Nil) DC AC Perpendicular Z76 3 wire IC circuit 5V P P Yes Z73 12V 100V P P P Reed switch Grommet Relay, PLC 2 wire 24V 5V 12V 100V or less No Z80 IC circuit P P Y59A Y69A P p P 3 wire (NPN) IC circuit 5V 12V Y7P

SMC Pneumatic Clean Series

Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2 blow 60

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

voltage Lead wire length (m) Auto switch model Electrical entry Wiring (Output) Special functions 0.5 (Nil) 3 (L) 5 (Z) Applicable load Indicator light Type Electrical entry direction DC AC Perpendicular In-line IC circuit Z76 5 V 3-wire Grommet Yes Reed switch Z73 24 V 12 V 100 V Relay PLC 2-wire 5 V 12 V 100 V or less IC circuit Z80 No 3-wire (NPN) IC circuit 3-wire (PNP) Y7PV Y7P

MHx-OMU0057

Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60

MGF

Electrical entry direction Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) Applicable load Indicator light Special function Electrical entry Wiring (output) Type DC AC IC circuit Z76 5V 3-wire Grommet Yes Reed switches Solid state switches Relay PLC Z73 100V 24V 12V 2-wire 100V or less 5V 12V IC circuit Z80 No 3-wire (NPN) Y59A Y69A 5V 12V IC circuit 3-wire (PNP) Y7PV Y7P Y59B Y69B 2-wire

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

NPN) Reed switch Solid state switch Z76 5 V IC Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Relay, PLC 100 V, 200 V 2-wire 24 V Diagnostic indication (2-color) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC Grommet 100 V, 200 V 12 V 2-wire 3-wire (NPN) 3-wire (PNP) IC Relay, PLC 5 V, 12 V Diagnostic indication (2-color) 12 V 2-wire 24 V Water

Clean Rodless Cylinder Series CYP

Without auto switch Auto switch model Electrical entry direction Lead wire length (m) Type Piping port position 3 (L) 5 (Z) 0.5 (Nil) Perpendicular Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV In-line Z76 Z73 Z80 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y7BA Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left

Compact Guide Cylinder End Lock Type SeriesMGP

P P P Lock position Z80 P P H R Rear lock Front lock Y59A Y69A P p P Manual release Y7PV Y7P P P p N L Non-locking type Locking type Y59B Y69B P p P Solid state switch Y7NW Y7NWV P P p Y7PW Y7PWV P P p Y7BW Y7BWV P P p Y7BA P p Lead wire symbols 0.5m . Nil (Example) Y69B 3m . L Y69BL 5m . Z Y69BZ Solid state switches marked with a "p" are produced upon receipt of order.

Guide Table Series MGF

Electrical entry direction Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) Applicable load Indicator light Special function Electrical entry Wiring (output) Type DC AC IC circuit Z76 5V 3-wire Reed switches Solid state switches Grommet Yes Relay PLC Z73 100V 24V 12V 2-wire 100V or less 5V 12V IC circuit Z80 No 3-wire (NPN) Y59A Y69A 5V 12V IC circuit 3-wire (PNP) Y7PV Y7P Y59B Y69B 2-wire