CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

RZQ

Caution 5 150 100 200 300 1.

MGP

3.68 4.10 4.53 4.95 5.99 6.85 7.70 8.55 50 MGPM50 3.36 4.00 4.73 5.37 6.01 6.65 7.29 7.93 9.54 10.8 12.1 13.4 63 MGPM63 4.18 4.94 5.78 6.54 7.29 8.05 8.80 9.56 11.4 12.9 14.4 15.9 80 MGPM80 6.49 7.43 8.67 9.61 10.5 11.5 12.4 13.4 15.8 17.7 19.5 21.4 100 MGPM100 10.5 11.9 13.6 14.9 16.3 17.6 18.9 20.2 23.6 26.2 28.9 31.5 (kg) MGPL12100/MGPA12100( (mm) (mm) 10 20 25 30 40 50 75 100 125 150

CRQ2

Internal voltage drop Indicator light (lights when ON) Applications AC DC 24V or less AC DC 48V or less AC DC100V or less 24VDC 100VAC 50mA 40mA 20mA 5 to 40mA 5 to 20mA Relay, PLC, IC circuit D-A90 D-A90V None 0 Relay, PLC D-A93 D-A93V 2.6V or less D-A96 D-A96V 4 to 8VDC 20mA 0.8V or less IC circuit Lead wires D-A90, A93 : Oil resistant heavy duty vinyl cord 2.7 0.18mm x 2 wire (Brown

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Internal voltage drop Indicator light (lights when ON) Applications AC DC 24V or less AC DC 48V or less AC DC100V or less 24VDC 100VAC 50mA 40mA 20mA 5 to 40mA 5 to 20mA Relay, PLC, IC circuit D-A90 D-A90V None 0 Relay, PLC D-A93 D-A93V 2.6V or less D-A96 D-A96V 4 to 8VDC 20mA 0.8V or less IC circuit Lead wires D-A90, A93 : Oil resistant heavy duty vinyl cord 2.7 0.18mm x 2 wire (Brown

Table of Contents

203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

CLQ

175 M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 150l x 175l 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 M6 x 90l 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 M10 x 110l -10D -15D -15D -15D x 95l x 115l Data -15D

Compact Cylinder with Lock Series CLQ

175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D CDLQB32-10D CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D

Sine Rodless Cylinder Series REBR Direct Mount Type

Load voltage Lead wire length (m) Note 1) Auto switch model Indicator light Special function Type Electrical entry Applicable load Wiring (output) 0.5 (Nil) 3 (L) 5 (Z) AC DC A90 5, 12V 24V IC circuit No 100V or less Reed switch 2 wire Relay, PLC A93 12V 100V Grommet Yes A96 3 wire (NPN equiv.) 5V IC circuit F9N 3 wire (NPN) Solid state switch F9P Relay, PLC 3 wire (PNP) 24V 12V

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

D-F6N/D-F6P/D-F6B

Applicable model: D-A73, A73H, A73C, A93, A93V, A53, A54, B53, B54, C73, C73C, E73A, Z73, D-R73, R73C, 97, 93A, A33, A34, A33A, A34A, A44, A44A 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed. 1. Keep wiring as short as possible.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

CRQ2

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

MK

A76H A96V A96 IC 5V A72 A73 A72H A73H 200V Yes Yes No No Yes Yes Grommet Reed switch 12V 100V A93V A90V A93 A90 Option Part No.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.

Hydraulic Cylinders

Nil (Example) A93 3m . L (Example) A93L 5m .

Heavy Duty Stopper Cylinder

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.