Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

D-F6N/D-F6P/D-F6B

Applicable model: D-A73, A73H, A73C, A93, A93V, A53, A54, B53, B54, C73, C73C, E73A, Z73, D-R73, R73C, 97, 93A, A33, A34, A33A, A34A, A44, A44A 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed. 1. Keep wiring as short as possible.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

CRQ2

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

MK

A76H A96V A96 IC 5V A72 A73 A72H A73H 200V Yes Yes No No Yes Yes Grommet Reed switch 12V 100V A93V A90V A93 A90 Option Part No.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.

Hydraulic Cylinders

Nil (Example) A93 3m . L (Example) A93L 5m .

Heavy Duty Stopper Cylinder

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Weight reduced by 53% at the maximum Overall length (Z + Stroke) Overall Length (Z) Weight (mm) (kg) Series MY3A MY3B MY1B Series MY3A MY3B MY1B 63 63 40 40 25 25 16 16 320 8.26 240 2.95 150 0.99 110 0.34 356 8.99 276 3.08 178 1.09 122 0.35 460 14.5 340 4.41 220 1.57 160 0.73 At a 100 mm stroke Series Variations Positioning cushion mechanism The uniquely designed piston shape enables reduction

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 841 1402 1962 63 OUT 935 1559 2182 IN 1361 2268 3175 80 OUT 1508 2513 3519 IN 2144 3574 5003 100 OUT 2356 3927 5498 Intermediate Strokes Installation of spacer on standard stroke body. Method Model no. Refer to page 4 for standard model no.

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Z (Super Compact), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Type: L (Ball Bushing), Bore Size: Ø32 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 150 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L [3m]

Bearing Type: M (Slide Bearing), Bore Size: Ø20 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 150 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z [5m]

Bearing Type: L (Ball Bushing), Bore Size: Ø16 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 150 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Type: M (Slide Bearing), Bore Size: Ø25 mm, Port Thread Type: TN [NPT], Stroke: 150 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L [3m]

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 150 (1 1/2"), Stroke: 1000 (10"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 150 (1 1/2"), Stroke: 0600 (6in), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal