ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

17

V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

100

to 24 VDC 12 to 24 VDC FUNC FUNC Blue DC () Blue DC () Output specification A NPN (2 outputs) Output specification B PNP (2 outputs) ZL1 Series ZL3/ZL6 Series Brown DC (+) Brown DC (+) Load Black OUT1 Black OUT1 Load Load Main circuit Main circuit + + White OUT2 White OUT2 12 to 24 VDC 12 to 24 VDC Load FUNC FUNC Blue DC () Blue DC () Output specification C NPN (1 output) + Analog voltage

HRX-OM-M090

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-7 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-M090 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

CNS

Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range.

SYJ300/500/700

For DC voltages other than 12 V and 24 V, incorrect wiring will case damage to the surge suppressor circuit. Applied voltage 24 V 0 V Standard With power saving circuit 0.4 W 0.1 W 0 W 62 ms 4-4-58 59 Series SYJ300/500/700 Specific Product Precautions 4 Be sure to read before handling.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight kg Load weight kg 16 12 25 15 MY2C40 MY2HT40 Horizontal impact: P = 0.5 MPa 40 24 Horizontal impact: P = 0.5 MPa Stroke Adjusting Unit Holding Bolt Tightening Torque (Nm) 2000 1500 2000 1500 H unit H unit Impact speed mm/s Impact speed mm/s L unit 1000 1000 Bore size (mm) Tightening torque 16 0.6 L unit 500 400 300 500 400 300 25 1.5 Air cushion Air cushion 40 5.0 Calculation

Modular Design with Uniform Body Style

g*12 g*12 g*12 g*12 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

CLS

, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Different sides Same side Different sides Same side CNG 110 150 2 35 110 150 100 D-A3 D-G39 D-K39 MNB 150 + 30 (n 2) n = 2, 4, 6, 8

Guide Cylinder Series MGG

long strokes Bracket mounting strokes Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) P Y Z Y X T W S V R Q R U 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65

MY2

110 R 5 8 12 RR 5.3 8.5 11 NV 4.5 6.6 9 NW 85.2 124.8 150.1 NX 7.3 10.5 14 PP 5.3 8 16 Q 140 185 290 QQ 16.4 20.4 25.5 Model MY2HT16G MY2HT25G MY2HT40G U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 X 7 9 12 XX 12 14 23 Y 5 8 12 Z 160 210 330 "P" indicates cylinder supply ports.

Thermo-con/Rack Mount Type

1000 Ambient temperature 35C 500 500 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Heating Capacity HECR002-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol 20% 1000 900 800 700 600 500 400 300 200 100 0 1000 900 800 700 600 500 400 300 200 100 0 Heating capacity [W] Heating capacity [W] Ambient temperature

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches can be mounted

Vacuum System Peripherals:

) Diaphragm reed switch (100 VAC) 1 point setting M21 Note) Low wattage type is,12, 24 VDC.

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

Ionizer

1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance (mm) Distance

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(L): 10-SYJ7143-L01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 91 104.2 MAX.10 57.5[64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) 68.6[75.6] Approx. 300 20 20 20 20 Pg7 95.1[97.3] 85.3[87.5] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to page 563

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

12 8 10 10 41 5 31 10 25 to 300 15.5 25 22 17 16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10 48 16 25 to 500 21 (mm) Bore size (mm) IA K MM NA NB NN P RR S T U V W Z ZZ -0.020 -0.053 20 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 13.5 81 9.5 14 4.5 6.5 136 150 -0.020 -0.053 -0.025

7

Note 2) Conversion Cv Flow rate characteristics Max. operating pressure differential Min. operating pressure differential Note 1) (MPa) Port size Body material Orifice diameter (mm) Model Max. system pressure (MPa) Weight (g) AC DC Kv 500 500 500 740 740 860 1390 5430 6840 8440 1.9 2.4 2.4 4.5 5.5 9.5 13 23 31 49 1.6 2.0 2.0 3.9 4.6 8.2 11.0 19.6 26.4 42.8 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/8