SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

CM2

10 14 MB +0.070 0 0.1 0.3 12 16 24 50 M14 x 1.5 92 20 14 13 +0.070 0 0.1 0.3 12 16 69 22 24 55 M14 x 1.5 15.5 20 Double Knuckle Joint MB1 Y (Max.)

48

(10 x 2) 0.13 0.10 0.08 0.06 0.04 [kg] Bore size Stroke [mm] 10 20 25 30 50 100 150 200 12 (10 x 2) 0.9 0.7 0.5 0.4 0.2 16 (12 x 2) 0.14 0.11 0.09 0.07 0.04 16 (12 x 2) 0.9 0.7 0.6 0.4 0.2 20 (16 x 2) 0.27 0.22 0.16 0.10 0.07 20 (16 x 2) 1.3 1.0 0.8 0.5 0.3 25 (20 x 2) 0.54 0.45 0.34 0.21 0.15 25 (20 x 2) 2.3 1.9 1.4 0.9 0.6 32 (25 x 2) 0.93 0.66 0.42 0.31 0.24 32

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

Micro Mechanical Valve Series VM1000

OFF 45 ON Max. 6 38 24.5 Symbol 3 port (A) 2 (A) 2 1.5 3 1.5 28 82 (110) 12 12 1 (P) R port (5 port only) 5 port (A) 2 (A) 2 12 12 1 (P) 3 (R) 3 (R) 32 16 40 R port (5 port only) 3 x 1/4 53.2 25 25 * 0.5 MPa supply 63.5 F .O.F .* 40 N T.T. 45 Foot pedal VM220-02-40A VM230-02-40A 3 x 6.5 mounting hole Symbol 2 port 54 71 (A) 2 152 12 10 159 1 (P) 177 3 port (A) 2 1/4 2(A) T.T. 12 10 1 (P)

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

SZ3000

8 210.5 200 187 12 2 160.5 150 134.5 13 3 173 162.5 145 14 4 185.5 175 155.5 15 5 198 187.5 166 16 6 210.5 200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 L1 L2 L3 L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

44

17.8 20.4 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44

Table of Contents

12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS

Vacuum System Peripherals:

to Best Pneumatics Vol. 16.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

AS331F AS421F AS431F Model 3.2, 4, 6 8, 10 Metric size 6, 8, 10 3.2, 4 4 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8" 5/32" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 230 180 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 3.5 2.7 4 6 7 10 12 14 24 26 Effective area (mm2) Note) Flow rate

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8

Stainless Steel One-touch Fittings Series KG

A M Weight (g) D L Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in

Series KG Stainless Steel One-touch Fittings

A M Weight (g) L D Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

Compact Guide Cylinder

(10 x 2) 0.07 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 0.06 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 0.05 63 (45 x 2) 80 (56 x 2) 0.04 100 (71 x 2) 80 (56 x 2) 63 (45 x 2) 100 50 (40 x 2) 40 (32 x 2) 32 (25 x 2) Load mass [kg] 25 (20 x 2) 20 (16 x 2) 10 16 (12 x 2) 12 (10 x 2) 1 0 50 100 150 200 250 300 350 Maximum speed [mm/sec] 5 Compact Guide Cylinder JMGP Series Bore Size 12 (10 x 2), 16 (12 x

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

15.2 18.5 20.9 18.5 20.9 4.5 5.2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 1/8" 5/32" 3/16" 1/4" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 11.4 12 9.3 11.4 13.2 11.4 13.2 15.2 13.2 15.2 17.9 17.9 21.7 12.7 12.7 10.5 10.5 13.5 12.7 13.5 17 18 17 18 21 22 21 22 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 22.4 25.2 6.2 12.3 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Bore size (mm) 40 50 63 16 20 25 32 Type Side support A MY-S40A MY-S63A MY-S16A MY-S20A MY-S25A MY-S32A Side support B MY-S40B MY-S63B MY-S16B MY-S20B MY-S25B MY-S32B For detailed dimensions, refer to page 8-12-22. 8-12-16 17 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Construction MY1W o !6 !3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !