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(kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

ZP

/Models With adapter/barb fitting 10 to 16 w q ZPY UT N B4 N4 10 r Connection thread (Female thread) C A D 5 Width across flats 10 Vacuum inlet e (Barb fitting) B4 M4 x 0.7 B5 M5 x 0.8 B N4 For 4 nylon tubing M-5AN-4 N6 For 6 nylon tubing M-5AN-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 29 Model Width across flats 7 17.5 A B Vacuum inlet direction q Pad dia.

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m C Lead wire length 0.6 m CL Lead wire length 3.0 m CN W/o lead wire L LN Lead wire length 0.3 m Connector type Y DC: 0.45 W (With indicator light: 0.5 W) Without lead wire (Applicable to only DC) Plug connector type LO Without connector M Lead wire length 0.3 m 24 VDC and 12 VDC are applicable to 0.45 W.

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

V

www.stevenengineering.com I 2.61 SOLENOID VALVES SERIES (N)VZ300 H O W T O O R D E R M A N I F O L D T Y P E 40 B O T T O M P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 B O T T O M P O R T E D (N)VV3Z3 40 2 N U M B E R O F S TAT I O N S 02 2 stations to 20 20 stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) 01T 1/8 NPTF ACCESSORIES M

LJ1H

m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 10 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

, R port C10 (10 One-touch fitting) C8 (8 One-touch fitting) C12 (12 One-touch fitting) 1/8 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) 1/4 C8 (8 One-touch fitting) C10 (10 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port Manifold base weight W (g) Note 2) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m +

Battery-less

Vertical Mounting, Sliding Bearing q 70 mm stroke or less w Over 75 mm stroke 100 100 LEYG32M E/40M E Load mass m [kg] Load mass m [kg] LEYG32M E/40M E LEYG16M E 10 10 LEYG25M E LEYG16M E LEYG25M E 1 1 0.1 0.1 10 100 1000 10 100 1000 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed.

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Applicable shaft type: W Applicable shaft type: W (mm) Q2 L2 max Y Size (mm) Q1 = M Q2 = M 10 Q1 L1 max X Size M4 Y 3 7 to 8 Y = 10 15 M4 X 5 9 to 14 M5 Y 3.5 8.5 to 9 L2 = L1 = 15 20 M5 X 6 11 to 18 M6 Y 4 10 X = 20 30 M6 X 7 13 to 20 M8 Y 5 13 30 40 M8 X 8 16 to 22 M10 Y 6 15 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D2011-3-15 50 Rotary Actuator with Angle Adjuster Free Mount Type, Vane Style Series CRBU2WU Size: 10, 15, 20, 30, 40 How to Order Without auto switch CRBU2 W U 10 180 S Size 10 15 20 30 40 Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W Applicable shaft type: W (mm) Q2 L2 max Y Size (mm) Q1 = M Q2 = M 10 Q1 L1 max X Size M4 Y 3 7 to 8 Y = 10 15 M4 X 5 9 to 14 M5 Y 3.5 8.5 to 9 L2 = L1 = 15 20 M5 X 6 11 to 18 M6 Y 4 10 X = 20 30 M6 X 7 13 to 20 M8 Y 5 13 30 40 M8 X 8 16 to 22 M10 Y 6 15 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft

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amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vertical Mounting, Sliding Bearing q 70 mm stroke or less w Over 75 mm stroke 100 100 LEYG32M Load mass m [kg] Load mass m [kg] 10 LEYG32M LEYG25M 10 LEYG25M 1 0.1 1 10 100 1000 1000 10 100 Eccentric distance L [mm] Eccentric distance L [mm] * The limit of vertical load mass varies depending on lead and speed. Check SpeedWork Load Graph on page 748.

smcmaintenancepartslist

How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Material t Symbol 149 149 m Nominal filtration rating Symbol N V NBR FKM 150 Element type Type 188 Symbol M Gold mesh Port size r Symbol 10 R1 Port size OUT IN Note Replacement Parts Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Stainless steel 304 No. Description Element Material Kit No.

REA/REB

RE A B Maximum load weight (Wmax) + Static moment (M) n = Load weight (W) Allowable static moment (Mmax) + Dynamic moment (Me) Allowable dynamic moment (Memax) 1 REC CX Load Weight CY W Maximum Load Weight (kg) W MQQ M 50 40 30 REBHT32 Wmax Model REBH15 9 REBH25, REBHT25 25 RHC REBH25 20 25 16 REBHT25 REBH15 10 MK(2) Load weight (kg) REBHT32 40 9 5 4 3 W RS Q G 2 W RS H A 1 RZQ 0.5 MI W

REA/REB

Maximum load weight W 1 = W/Wmax = 1/9 = 0.111 L2 CE1 Examine W. CE2 L1 ML2B 2. Static moment M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W C J G5-S Examine M2. Since M1 & M3 are not generated, investigation is unnecessary.

Rotary Actuator/Vane Type

Q1 = M Applicable shaft type: W Applicable shaft type: W Q2 = M L1 = Y = X = L2 = [mm] Size CRB2, CRBU2 Y L2 max Q2 10 7 to 8 Y-3 M4 15 8.5 to 9 Y-3.5 M5 20 10 Y-4 M6 30 13 Y-5 M8 40 15 Y-6 M10 [mm] Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 9 to 14 X-5 M4 7 to 14 X-3 M4 15 11 to 18 X-6 M5 8.5 to 18 X-3.5 M5 20 13 to 20 X-7 M6 10 to 20 X-4 M6 30 16 to 22 X-8 M8 13 to 22 X-5 M8 Symbol: A5

Hydraulic

x 100l x 115l 115 50 (M) 100 50 (M) M5 x 55l x 140l 140 75 (M) 55 CHKDB25 5 (M) x 60l x 165l 165 100 (M) 60 10 (M) x 65l M12 x 75l 75 CHKDB63 5 (M) 65 15 (M) x 70l x 80l 80 10 (M) 70 20 (M) x 75l x 85l 85 15 (M) 75 25 (M) 10.4 x 80l x 90l 90 20 (M) 80 30 (M) x 85l x 95l 95 25 (M) 85 35 (M) x 90l x 100l 100 30 (M) 90 40 (M) 16 x 95l x 105l 105 35 (M) 95 45 (M) x 100l x 110l 110 40 (M) 100