A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?

A large digital display provides a clear view of the current and set values. 

Battery-less

35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE Lead A B C A B C A B C A B C Ambient

Integrated Controller

Lead 20: EQY25H 100 Min. 25% Max. 50% 10 20 30 40 50 90 70 80 60 0 Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 Pushing force set value [%] Ambient temperature Pushing force set value [%] Duty ratio [%] Continuous pushing time [min] 40C or less 50 or less 100 Pushing force 45% 50% 70% 42 Battery-less Absolute (Step Motor 24 VDC) Easy to

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

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Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

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Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

AC Servo Motor Driver (Pulse input type/Positioning type)

(RES) A.10 Undervoltage A.12 Memory error 1 (RAM) A.13 Clock error A.15 Memory error 2 (EEP-ROM) A.16 Encoder initial communication error1 A.17 Board error A.19 Memory error 3 (Flash-ROM) A.1A Motor combination error A.1C Software combination error A.1E Encoder initial communication error 2 A.1F Encoder initial communication error 3 A.20 Encoder normal communication error 1 A.21 Encoder normal

Cylinder

l (mm) A A' s i s .D I E I F GA I GsJ H I I Bore Size J MM NN 6 7 9 14 14 3 10.5 8 6 6 17 10 10 12 15 17 5 13 I 8 6 I 7 20 L .. 6 M3x O.5 MlO xlO 7 3.4 1.6 24 16 32 97 ; ~ 4.5 Hi ' 28 1S 10 5.5 1 2.3 36 22 49 ~ 7 I M4X O.7 M12X1 .. 0 15 12 14 20 1 19 6 15.5 I 10 6 I 7 24 9 I M5X O.8 MI4 X tO - Series CJP 2-M5xo.B z H s A F GA G8 A A' jI ~: 1=r=if1+ :' -,LitL*'ft ? .. =.'

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Direct Solenoid

Eody Asdnbly-l/a. NF IF p.rt!. Inctuda body .nd (2) tocktno ths. sprir|oSt AXT0r&4 Spnig-spool rotlm xmosl0 of!!L-!!9qtq 4RP568414 5'Oool A s|erD Aas,y Galket-aolnold cov.r xTot1{l 1 spac.r AXT!1&5 1 cavr asldnbly-a"c. 3ol6nold. cnmB|3 ol cov.r, recsd no}tocking oplralor, and {4) dot, 12, Cdor a!.mt,y-A,C. tol.|lold, wltioul manual oprrtor, and Nith oorator mounllng hol. pl!

FKM (Fluoro rubber) is used for the fluid-contact rubber materials, allowing use even in ozone environments.Manifolds for VKF300 body ported valves , Stations: 1 to 20, Common SUP/Common EXH, Common SUP/Individual EXH, Optional bracket on Common EXH type, MFLD, VKF334, BASE MT,SIDE PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, .88880 lb

FKM (Fluoro rubber) is used for the fluid-contact rubber materials, allowing use even in ozone environments.Manifolds for VKF300 body ported valves  , Stations: 1 to 20, Common SUP/Common EXH, Common SUP/Individual EXH, Optional bracket on Common EXH type, MFLD, VKF334, BASE MT, BTM PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, 0.77161 lb

FKM (Fluoro rubber) is used for the fluid-contact rubber materials, allowing use even in ozone environments.Manifolds for VKF300 body ported valves  , Stations: 1 to 20, Common SUP/Common EXH, Common SUP/Individual EXH, Optional bracket on Common EXH type, MFLD, VKF334, BASE MT, SIDE PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, 0.4791 lb

, Stations: 1 to 20 , Common SUP/Common EXH, Common SUP/Individual EXH , Optional bracket on piping type 40, MFLD, VKF334, BASE MT, SIDE PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, 0.36518 lb

, Stations: 1 to 20 , Common SUP/Common EXH, Common SUP/Individual EXH , Optional bracket on piping type 40, MFLD, VKF334, BASE MT, SIDE PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, .16755 lb

FKM (Fluoro rubber) is used for the fluid-contact rubber materials, allowing use even in ozone environments.Manifolds for VKF300 body ported valves  , Stations: 1 to 20, Common SUP/Common EXH, Common SUP/Individual EXH, Optional bracket on Common EXH type, MFLD, VKF334, BASE MT,SIDE PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, 0.88184 lb