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Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

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SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB

Electric Actuator/Slider Type

m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 0 0 00 0 5 10 15 20 0 4 2 6 8 10 10 20 30 L4 Work load [kg] Work load

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

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Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3.2 14.5 VP4 36 (45) S0700 (4.9) (37) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) VQ VQ4 (40.2) 12.7 40.4 (36.7) 28.1 [35.1] 20.5 + VQ5 VQC 15 0.8 (20) 1.6 VQZ For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 SQ VFS VFR M plug connector (M): DIN terminal (D, Y): M8 connector (WO): L plug connector (L): SY5 20-L(-F2) 3 4 5 SY5 20-M(-F2) 3 4 5 SY5

Electric Actuators

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 20 Standard Motor/Horizontal

MY1

50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.

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M L M L M N N Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Rc , , , B Mounting A C D E F Model 22.5 B1 B2 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47 55 59 60 62 18 21 21 20 20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The

V100

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Auto Switch Guide

CX 10-20-47 CY Direct Grommet 10-20-48 D-Y7NWV/Y7PWV/Y7BWV MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-M5NW/M5PW/M5BW D-H7NF D-G59F D-F79F D-F59F The output signal can be detected in an unsteady detecting area. 10-20-49 10-20-50 RHC Solid state switch

CATALOG

K M MM N P S W Without gaiter with gaiter 40 ~ 800 20 ~ 800 27 30 60 44 16 32 15 15 M 8 x 1.25 6 11 M 14 x 1.5 27 1/4 84 8 50 ~ 1000 20 ~ 1000 32 35 70 52 20 40 17 17 M 8 x 1.25 7 11 M 18 x 1.5 30 3/8 90 0 63 ~ 1000 20 ~ 1000 32 35 85 64 20 40 17 17 M 10 x 1.25 7 14 M 18 x 1.5 31 3/8 98 0 80 ~ 1000 20 ~ 1000 37 40 102 78 25 52 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 1000 20

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 747 LEYG Series AC Servo Motor * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 746 and 747.

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

Smooth Cylinder/Low Speed Cylinder

D C Clevis Pin (For CM2E) H B (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no. SN-020B SN-032B SN-040B Material: Carbon steel 26 30 25.5 M20 x 1.5 8 Dd9 d 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 m m t t L L1 (mm) Trunnion Nut Applicable bore size (mm) 20, 25 32, 40 Applicable retaining ring part no. Dd9 d L L1 m t Part no.

Battery-less

4 8 12 16 20 0 1 2 3 6 4 5 L8 Work load m [kg] Work load m [kg] Work load m [kg] Calculation of Guide Load Factor Mounting orientation 1.

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K 20 m roll 100 m reel TUS1208 TUS0425 TUS0604 TUS0805 TUS1065 Model M Tubing O.D.

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: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 0 20 40 60 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 20 21 Courtesy of Steven