2 Phase Stepper Motor/Without Motor Brake Series LXS

is required when connecting a brake. 2-M2.5 thread depth 4 16 3 10 8 J 27 25 J x K Motor wire (300mm) Photo micro sensor wire (300mm) Brake wire (300mm) Stroke + 246 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 75.5 59 52 27 [18] 15 Stroke + 127 (39) (52) The dimension inside [ ] shows the location at which the home position switch operates. 58 28 N x P U 36: T-slot pitch 20

RSQ

ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

MY1

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

CJ2

Material: Iron CD(cd) 3.3 5 MM M4 x 0.7 M5 x 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 GB 18 23 H 20 20 KA 4.2 5.2 CX 3.2 6.5 A 15 15 BA 12 18.3 BB 12 18.3 CA 14 20 CB 14 20 Bore size (mm) 10 16 Dimensions by Stroke Applicable bore (mm) Part no.

Applicable Auto Switch Model

(Tolerance 30%) 5.3-39 Solid State Switch/Direct Mounting D-Y59 /D-Y69 /D-Y7P(V) A B A B Applicable Actuator Series Grommet Series Bore size (mm) MGQ, MVGQ, MGP CXS MY1B MY1C, MY1M, CY1R MY1H, ML2B MGF CY1H RSH 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 6, 10, 15, 20, 25, 32 25, 32, 40, 50, 63, 80, 100 25, 32, 40, 50, 63 25, 32, 40 40, 63, 100 10, 15, 20, 25, 32 20, 32, 50, 63, 80 Specifications

Tie-rod Type Hydraulic Cylinder

16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 421 CHAW Series Dimensions Rod flange type: CHAWF 4 x FD 4 x J 2 x Rc P T T V V Cushion adjustment screw GA Air release GA M Width across flats G Width across flats G MM MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A K H + Stroke S + Stroke FX H ZZ + 2 strokes FZ (mm) Bore size (mm) A B C a B E D

CY1

, 25 CY1H15, 20, 25 L LL CY1H -B PA 4-M thread depth MM 15 20 25 Guide central axis ZZ XA XB PB Piping port surface S + Stroke LW EB EA 2-P HC HP H HB HA HG HT NT Square nut for body mounting J 8 PP A N W Z + Stroke TW NL (mm) Model A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

Table of Contents

Mep a = 1000 2000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 L2 (mm) L3 (mm) Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (

Floating Joint

J J Centering is unnecessary. A high level of machining accuracy is unnecessary. Spherical rotation The installation time is dramatically reduced. It is compact and is suitable for high tensile stresses.

MQQ

A B FD FT FV FX FV MI W S 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ CEP1 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50, 75, 100 64 42 5.5 8 48 56 CE1 28 10 to 50, 75, 100 70.5 48.5 5.5 8 54 62 25, 28 CE2 Bore size (mm) FZ L M FV 10 55 18 ML2B 16 60 20 FX FT L B + Stroke 20 64 20 C J G5-S FZ 25 65 22 34 A + Stroke 4-FD 28 72

MQQ

J G5-S FZ 25 65 22 34 A + Stroke 4-FD 28 72 22 40 CV MVGQ CC Head side flange style: MQQTG 10, 16, 20 25, 28 RB 2-FD 4-FD J Bore size (mm) Stroke range (mm) A L DM FV FV 10 10 to 40 45 8 B + Stroke -X L FT FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 2025 10 to 50, 75, 100 62 12 28 10 to 50, 75, 100 68.5 12 Data (Dimensions except A and L are same as rod side flange style

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW GB PH 2 x Cushion valve Width across flats B1 MM LZ D E C B F H1 C M N BN AL B K A S + Stroke M H ZZ + Stroke With rod boot l 10.2 h + l ZZ + l + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32

CLA

A 09 9N 9P BO (mm) Without boot With boot ,, ZZ+t+SlroItQ MM J 00 oE F GA GB GC GO GL GR J K L L2 16 32 10 85 15 26 54 10 10 M8xl.2S 6 30 71 40 500 20500 27 30 60 96 y. Y. 44 M14X l .5 M18X l .5 M\8X l .5 M22Xl.5 M26X1.5 , 50 -600 20-600 32 35 70 108 Y. Y. 52 63 !

51

MB1 D-G5, K5, G5W, G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8/D-C73C, C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-H7, H7W D-H7NF, H7BA, D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 Hs Hs 24.5 16 A B B A (mm) Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NT D-G5BA Auto switch model Auto switch model D-M9 D-M9W D-M9A D-A9 D-H7

1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

MK

Do not clamp on a slanted surface. 5. Make sure that the workpiece does not move during clamping. J D-X 20Data Fig. (5) Fig. (6) 10-7-3 4 Rotary Clamp Cylinder: Standard Type Series MK 12, 16, 20, 25, 32, 40, 50, 63 How to Order MK A S F9BW 20 10 R F Number of auto switches Nil S 2 pcs. 1 pc.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M20 x 1.5 20 B J M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M24 x 1.5 31.5 C series rod K M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M30 x 1.5 31.5 A M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M39 x 1.5 40 Note) The pin, keeper plate and cap bolt are included with a double knuckle joint.