Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: JMS (w/Automatic Fluid Fill Function + Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: M (Applicable to Deionized Water Piping)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: B (w/Earth Leakage Breaker)

An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: SW (Conforming to CE/UL Standards + SI Unit Only)

1

-9200-www.stevenengineering.com Model F L K P Q S SS Z ZZ MB CXWM25-225 96 241 20.5 90 525 227 282 509 553 CXWM25-250 108.5 266 20.5 90 575 252 307 559 603 MB1 CXWM25-275 121 291 20.5 90 625 277 332 609 653 CXWM25-300 133.5 316 20.5 90 675 302 357 659 703 CA2 20, 32 (mm) CS1 Model F L K P Q S SS Z ZZ C76 CXWM20-225 94.5 239 20 90 520 227 279 506 534 CXWM20-250 107 264 20 90 570 252 304 556

0.4

Direct EXH outlet with built-in silencer [-S] Exhaust This is a type with an exhaust port a top the manifold end plate. The built-in silencer exhibits an excellent noise suppression effect. (Noise reduction: 30 dB) When ordering this option incorporated with a manifold, suffix S to the end of the manifold part number.

NCA1

Description Material 1 Rod Cover Aluminum alloy NCA200-02AQ3609-S NCA200-03-Q3609-S NCA250-02AQ3610-S NCA250-03-Q3610-S NCA325-02AQ3611-S NCA325-03-Q6311-S 2 Head Cover Aluminum alloy 3 Cylinder Tube Aluminum alloy Please See below for How to order Cylinder Tube 4 Piston Rod Carbon steel Available only as an Assembled Item.

CNG

0.5 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200

High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

MY2

speed mm/s Piston speed mm/s Piston speed mm/s Load weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

2/3 Port Valve

Oil Air Water Vacuum (V, M) Power (C) Steam (S, Q) Oil (D, N) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC (Std.) (Std.) (Std.) VX21 (X, E, N, P) 80 60 99 120 183 60 60 60 AC DC Max. DC 60 40 40 40 40 AC Min. AC, DC (1) (2) 10 20 1 10 5 VX22 DC Note 1) Dew point 10C or less Note 2) 50 cST or less Note 3) "X", "E", "N", "P" etc. in the parenthesis are option symbols.

SV

SUP/EXH block assembly specifications 20 20 stations Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations. Use of a single solenoid will result in an unused control signal. If this is not desired, order with a specified layout.

MNB

/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 100 80 200 200 50 40 50 100 100 63 Load weight: m(kg) Load weight: m(kg) 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP

Rotary Table/

8.5 16.5 90 69 8H9 4.5 54 8H9 6.5 19 20 Rotary Table/Rack-and-Pinion Type Series MSQ With External Shock Absorber Size: 10, 20, 30, 50 How to Order MSQ B 10 L S F9B 2 Number of auto switch 2 pcs. 1 pc. n pcs.

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 19 Not included for Option Z (Removed parts) 20 Not included for Options Z and Z1 (Removed parts) 15 Thermo-chiller/Rack Mount Type HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR012-W-20 HRR018-W-20 HRR024-W-20 HRR030-W-20 Cooling method Water-cooled refrigeration Refrigerant R410A