HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

Quick Exhaust Valve Series AQ

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be

Speed Controller with One-touch Fittings Series AS In-line Type 1

AK ASS ASR ASF 15-9-11 3 Series AS Construction Component Parts No. q w e r t y u i o !0 !

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AK ASS ASR ASF 15-9-25

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

1

VM SUP blocking disk assembly SY30M-40-2A SY50M-40-1A SY70M-40-1A EXH blocking disk assembly Series SY3000 SY5000 SY7000 SY30M-40-1A SY50M-40-1A SY70M-40-1A XT34 Label for blocking disk If the blocking disk assembly is ordered using the manifold specification sheet and ordered at the same time as the manifold, the position where the blocking disk assembly is inserted will be labeled and

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

Residual Pressure Release Valve

Pressure in the cylinder MPa D L1 Q Condition: Cylinder I.D. 100 Stroke 200 mm ASP 0.5 B A D 0.4 8 4.2 ASN Applicable tubing W (mm) 0.3 M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M AQ 0.2 KEA06 KEA08 KEA10 KEA12 12.8 15.2 18.5 20.9 24 27 29 31 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 10 15 22.5 29.5 ASV 0.05 MPa 0.1 0.05 AK

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Material 14284 NBR Description O-ring ASP y ASN AQ ASV AK ASS ASR ASF 15-9-35

Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 100 (10 kW), Cooling Method: W (Water-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)