Precision Regulator

Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8. Assembly drawing 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

VZM500

(Except push-pull) Note 2) For push button (mushroom), push button (extended), push button (flush) and a single unit of fastening ring, refer to pages 5-6-6 to 5-6-7. The other parts are not replaceable.

PAB-OM-O003

Precautions for system design . 6 2. Precautions for installation . 7 3. Maintenance and check . 9 4. Handling Precautions . 10 5. Names and functions of parts . 10 6. How to use . 11 7. Specification and how to order . 12 8. Discharge capability . 14 9. Troubleshooting . 16 10.

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

Digital Pressure Switch

If this setting is not necessary, press the and buttons simultaneously for 1 second or longer. -34No.PS-OMV1001-C [F 6] Fine adjustment of display value This function is used to manually perform fine adjustment of the displayed pressure. It is adjustable within the range 5%R.D. Press the or button in function selection mode to display [F 6]. Press the button.

25

Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

Digital Flow Switch (Integrated display type)

Normal condition (NOR): Flow measurement reference condition 101.3 kPa, 0 C. -55No.PF-OMJ0006-J Piping port specifications Model 01 02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 6 1/4 (5/32") (5/16") Thread type (Port size) Rc Rc NPT NPT G G OneOneOneOne1/8 1/4 1/8 1/4 1/8 1/4 touch fitting touch fitting touch fitting touch fitting Straight without flow adjustment valve 95 g 125 g 55 g Bottom entry

Precision Regulator Series IR1000/2000/3000

X465 0.1 to 1 0.001 Specifications Set pressure range (MPa) Desolution of setting and display (MPa) Class 10 With M5 fitting (Applicable tubing O.D. 6) Cleanliness Bleed hole Pressure switch 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With reverse connection protection) 40 mA or less Power supply voltage IR1000/2000: With M5 fitting (Applicable tubing O.D. 6) IR3000: Rc 1/2 female thread

Time Delay Valve

Operation Patterns 11 6. Characteristics 11 ~ 12 7. Dimensions 13 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

VMx-OMP0001

1.41.6Nm 8 2 VR2110 3 01.0MPa 0.250.8MPa 0.560s (*) 10 (%) F.S. oC( -560 3/ (s C (dm 0.6 [1 (P) 2 (A) ] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec

Pressure Sensor

M5 R06 R07 N01 Port size M5 x 0.8 male thread 6 reducer type 1/4 inch reducer type Wetted parts material Pressure sensor: Silicon, O-ring: NBR Body: Stainless steel 304 Body: PBT With sensor cable (3 m) 41 g 38 g Mass Without sensor cable 7 g 3.8 g -12No.PS-OME0004-G Analog output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -101 to 101 kPa -101

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Metric size Inch size Body size Port size 06 6 3 1/8 standard 07 1/4 Symbol Cylinder side 08 8 4 1/4 standard 09 5/16 01 R1/8 10 10 11 3/8 5 3/8 standard 02 R1/4 12 12 13 1/2 6 1/2 standard 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series XTO257102 Applicable tubing O.D.

S Couplers Series KK130

/O.D. mm Symbol 01 02 03 04 N01 N02 N03 N04 Symbol 07 09 11 13 Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Symbol 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose. Inch size 1

ZPT

08 8 10 10 13 13 16 16 20 20 1 8 NPT N01 1 8 NPTF T01 1 8 25 25 32 32 40 40 50 50 Material Pad type (Refer to Table (1) for applications.)

Digital Flow Switch (Remote type sensor unit)

(at 500 VDC) between terminals and case Standards CE/UKCA marked, UL (CSA) -21No.PF-OMJ0016-J Specifications of piping port Model 01 02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 6 1/4 (5/32") (5/16") Thread type (Port size) Rc Rc NPT NPT G G OneOneOneOne1/8 1/4 1/8 1/4 1/8 1/4 touch fitting touch fitting touch fitting touch fitting Straight without flow adjustment valve 95 g 125 g 55 g Bottom entry

NCX2 seies

Note: This diagram is for D-A7 or D-Ag type. ( ):with D-F7 or D-J7 type. o Series NCX2 o** Wrth Auto swibh H date rnount type: tlcopx@zs-ffi wi[| Aub svritch, HousirE mour type: rcoexz8zs-ffi 6' s ffi sl(_. I ffi f l * l l+l {_l l@tt L-I a Noler Thls diagfam is for D A7 or D,A8 type ( ) with D-F7 or D-J7lype.

® 2-Color Display High-Precision Digital Pressure Switch ZSE30A ( F ) /ISE30A Series

R1/8 (M5 female threaded) Option 2 ISG Nil None Bracket A N01 NPT1/8 (M5 female threaded) ZSM1 Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting 1/4 inch A2 Elbow type C4L One-touch fitting 4 mm, 5/32 inch Bracket C C6L One-touch fitting 6 mm A3 N7L One-touch fitting 1/4 inch Panel mount adapter Unit specifications Option 1 With

ZISE20A.eng

Piping specification: -01, -N01 After hand tightening, hold the hexagonal spanner flats of the pressure port with a spanner, and tighten with 2 to 3 rotations. As a reference, the tightening torque is 3 to 5 Nm. When tightening, do not hold the pressure switch body with a spanner. or longer simultaneously.

ZISE20B.eng

Piping specification: -01, -N01 After hand tightening, hold the hexagonal spanner flats of the pressure port with a spanner, and tighten with 2 to 3 rotations. As a reference, the tightening torque is 3 to 5 Nm. When tightening, do not hold the pressure switch body with a spanner. or longer simultaneously.