EXxx-OMW0014CN

1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

Fieldbus System

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

G VX 2 2 1 21 01 G 1 1 Normally Closed (N.C.)

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

Applicable tubing O.D. d AS221FE-01-04SK 12.7 27.5 20.4 4 9.3 26 AS221FE-01-06SK 13.5 14.3 27.5 20.4 6 11.6 27 (Hexagon width across flats) R 1/8 12 12 44.9 49.9 48.9 53.9 14.2 AS221FE-01-08SK 18.5 32.4 25.3 8 15.2 29 (Hexagon width across flats) AS221FE-01-10SK 15 21 40.2 33.1 10 18.5 31 AS221FE-02-04SK 16 34.4 25.2 4 10.4 36 AS221FE-02-06SK 18.2 17 34.4 25.2 6 12.8 37 R 1/4 17 14 41.2 46.2

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

Vacuum

Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000/2000/3000 Standard Specifications Model rRvlooo I rRvzno .ii I :lRv3qqot ,,l Regulaiing pressure range Nole 1 -100 to -1.3kPa

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Vacuum Pad: Ball Joint Type

-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F 10-0-A10 (With buffer/One-touch fitting) ZPT F 10-01-A14 (With buffer/Female thread) Applicable tubing O.D.

5 Port Solenoid Valve, Series VQC

B (+) () () (+) 14 14 Some connector manufacturers: SOL. A SOL. A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 HIROSE ELECTRIC CO., LTD. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

plate assembly VK300-42-1A VQZ 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Option Valve stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction

VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6

Vacuum Unit

(O.D.: Within 6.2) 10 Ejector System Vacuum Unit ZK2mA Series For Manifold Ejector + With Valve + Without Energy Saving Function Refer to page 14 for How to Order Manifold.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

1/4" 12 17 13.7 17.5 30.9 12.7 13.1 9.3 AS231FG-01-04 AS231FG-N01-01 24.9 24.4 4 9.3 1/8" 8.4 17 17.5 13.1 14.2 30.2 35.2 18 9.3 12.7 12 R 1/8 32.1 27.1 AS231FG-01-06 AS231FG-N01-03 22.9 36.3 30.9 13.5 14 26.9 24.9 6 11.6 5/32" 9.3 10.9 18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 35.2 30.2 27.1 32.1 28.2 40.8 18.5 16.2 23.9 30.9 26.8 14 8 15.2 3/16" 11.4 12.9 21 14 10.9 16.5 12.7 AS231FG-02-04