ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L Calculation example) T1 to T4 can be calculated as follows. Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Thermo-chiller/Rack Mount Type

Option symbol T1 Inverter Pump Mounted HRR010 20 T1 Inverter pump mounted Possible to choose an inverter pump in accordance with users piping resistance Cooling capacity will decrease by heat generated in the pump. The inverter pump does not use a mechanical seal. The 50 Hz and the 60 Hz inverter pumps have the same capacity.

ZP

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

VQ5000

Note 2) Splash proof specification is not available for F and T1.

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

42

(For F, L, S, T & T1 kits) D-Side End Plate Assembly 2. U-side end plate assembly part no.

Integrated Controller

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/10 = 0.03 [s], T3 = V/a2 = 300/10 = 0.03 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Slider Type Ball Screw Drive/11-LEFS Series

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

HRX-OM-X071

,T2Inverter pump 6.3.1 Option T1, T2Inverter pump With option T1 or T2, the pump output set value can be changed.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 2) Splash proof specification is not available for F and T1.

Vacuum Equipment

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

Title not found

Typ. 7/8 1 5/64 5 8 Hex 3/8 1 3/32 1 7/16 5/8 7/8 11/16 40 1/8 T2 1/2 1/8 T2 1/8 T4 1/8 T6 1/8 T3 1/8 T1 1/8 T5 1/8 T8 1/8 T4-90 1 1/16 Note: Reducing Tees available with other barb combinations #1 7/8 17 32 7 16 7 16 Hex Typ. 27 32 #3 1 3/32 3/4 3/8 Typ. 7/8 9 16 7 16 #2 #4 27/32 3/4 41 1/8 T2 x 3 1/8 RT3 x 1 1/8 T3 x 3 1/8 T1 x 3 1/8 T4 x 3 1/8 RT4 x 2 7/16 7/16 17/32 9/16 19/32

CATALOG

-25 NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ZSE401 T1-26 Vacuum Analog output 1~5V (+ 5%F.S.), load impedance : 1k ZSE401 T1-65 PNP output PNP open collector 80mA ISE4L01 T1-25 Positive Pressure NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ISE4L01 T1-26 100kPa Analog output 1~5V (+ 5%F.S.), load impedance: 1k ISE4L01 T1-65 (14.5PSI) Type

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

JOG and constant rate movement, return to origin, test drive and testing of forced output can be performed. 569 B LEC Series Teaching Box/LEC-T1 RoHS How to Order LEC T1 3 J G Enable switch (Option) Enable switch Teaching box Nil None S Equipped with enable switch Cable length [m] 3 3 Interlock switch for jog and test function Stop switch Initial language Stop switch J Japanese E English

Stability of suction position,

Adsorption Response Time with the Formula Adsorption response times T1 and T2 can be obtained through the formulas given below.

Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnic System Specif ication (continued) 2.