VXF

Start-up speed = PM x 0.9 t MPa/ms 17-3-74 5 The VX series will be revised shortly.

Dedicated Controller

RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed. Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

7

, T1 = 297 5K, 0.07 bar P 0.14 bar.

JXCx-OMT0034CN

LEC-T1-) 4.3.1 ID 2 (LEC)ID (LEC)ID ID 112 ID (LEC-W2) Normal Parameter Controller ID () Download (ID ID ) 4.3.2 IF (LEC)(LEC-T1) IF 115.2kbps (LEC-W2) Normal HELP-Password 17 - Para protectComm speed -1 Para protect 3: Common + Extend + Step -2 Download BasicParameter protect3: Common + Extend + Step downloadParameter protect Motor Comm speed115200230400 -1 Motor -2 115200

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

23 21 56.2 50 ASP530F-N03-11S-X369 31.6 43.1 20.8 3/8 18.5 ASP630F-N04-11S-X369 24 33.6 47.9 61.8 20.8 NPT1/2 NPT1/4 17 28.6 25.6 70.3 ASP630F-N04-13S-X369 1/2 23.81 21.7 35.2 49.5 63.1 21.8 XTO Series T2 D 2-T1 L3 L2 L1 Model T1 T2 D L1 L2 L3 XTO-2571-02 Rc1/4 52 52 21 57 XTO-2571-03 Rc3/8 XTO-1239-02 Rc1/4 84 80 37 79 XTO-1239-03 Rc3/8 Rc1/4 XTO-1239-04 Rc1/2 XTO-1719-06 Rc3/4 98 98 40

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

SFOD-OMT0005CN

(P.52) 8.3 / 8.4 () JXC91 ( 12) (ON )No 13.3 (P.57) -31- 9 9.1 (1) Offset (Word) 0 1 2 () 3 () 4 5 6 () 7 () 8 12 9 34 10 11 12 13 14 15 16 17 -32- (2) Word0 Word Bit 0 OUT0 DRIVE OFF No. Bit No.

3

, T1 = 297 5K, 0.07 bar P 0.14 bar.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

absolute, T1 = 297 5K, 0.07 bar DP 0.14 bar.

HRS100/150

[W] = 7.3 [kW] T = T2 T1 Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] T1: Outlet temperature 118 Cooling Capacity Calculation HRS100/150 Series Required Cooling Capacity Calculation Example 3: When there is no heat generation, and when cooling the object below a certain temperature and period of time.

53

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment 7325 [W] = 7.3 [kW] T = T2 T1 Cooling

Series VQ Metal Seal/Rubber Seal Body Ported

T1 (Terminal block of 1 row): 1 to 4 stations T2 (Terminal block of 2 rows): 5 to 8 stations T1 and T2 can be optionally chosen by adopting the combinations of single and double wiring (optional spec.), etc. How to connect wires to terminal block Open the terminal block cover to connect the wires to the terminal block.

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1

Thermo-con/Rack Mount Type

Circulating device Users equipment L 0.8 x 3 x 1 x 103 x 4.2 x 103 = T = T2 T1 60 x 1000 = 167 W T1: Outlet temperature 200 W Cooling capacity = Considering a safety factor of 20%, 167 W x 1.2 = Example 3 When cooling the object below a certain temperature in certain period of time.

Made to Order

H 50 ZZ + Stroke CLQ series A Bore size (mm) Stroke range (mm) L T1 h9 Without auto switch With auto switch 75.5 10 to 50 28 0 0.052 40 85.5 12 85.5 75,100 T1 h9 78.5 10 to 50 35 0 0.062 50 88.5 13 88.5 75,100 87 10 to 50 35 0 0.062 63 97 13 97 75,100 101.5 10 to 50 43 0 0.062 80 111.5 15 111.5 75,100 5 120 10 to 50 L 59 0 0.074 100 130 17 130 75,100 A + Stroke 1826 Made to Order Common Specifications

CQ2

B D E J M O YB-10 YU-10 YA-10 100 160 12 YB-03 7 25 9 34 11.5 Depth 7.5 32, 40 12 YB-05 9 32 11 42 14.5 Depth 8.5 50, 63 16 YB-08 11 38 13 52 18 Depth 12 80 19 YB-10 14 50 17 62 21 Depth 14 100 Weight (g) Bore size (mm) Part No. T2 V W T1 S 6.5 10 18 50 80 11 YB-03 32, 40 Part No.

Table of Contents

Specifications. 4 4 6 8 8 9 9 10 11 11 12 12 13 14 15 15 15 15 16 17 17 17 18 19 19 20 20 21 22 25 31 31 31 31 35 35 35 39 39 39 41 41 41 43 45 47 47 48 54 63 63 65 67 67 68 69 69 70 71 72 72 73 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions .

LVQ

) Refer to page 17-5-82 for How to order fitting parts.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Description Material Note 13 14 15 16 17 18 19 No.