Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)

Rated Flow Range: 0.05 to 5 L/min, Flow Adjustment Valve: None (Straight), Port Size: Rc1/8, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: Lead Wire w/Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 50 L/min, Flow Adjustment Valve: None (Straight), Port Size: Rc1/8, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: Lead Wire w/Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Model: 0 to -101kPa, Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire length) 300 : With light/surge voltage suppressor Built-in One-touch fittings VZ5 20-DIN terminal (D) VZ5 20-D-01 C6 C8 3 4 5 3 4 5 C6: MAX. 6 C8: MAX. 6.5 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable

Table of Contents

A VMG M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M5 x 0.8 M-5ALN-6 M-5ALU-6 M5 x 0.8 Barb Elbow for Nylon Tubing: M-5ALHN-4/-6 Barb Elbow for Soft Tubing: M-5ALHU-3/-4/-6 Effective area (mm2) Weight (g) Width across flats 7 M-5ALHN-4 M-5ALHU-3/-4 Model A B C D M-5ALHN-4 M-5ALHN

Table of Contents

3 m 5 m 3A 36 VJ10 110 VAC (with rectifier) How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire connector and the 5 m lead wire connector separately.

Table of Contents

02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14-M5 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Proposals for Energy Saving

VM430-01-32G VM-32AY Yellow VM430-01-32Y A set of Red, Black, Green, and Yellow included.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

A B 24 A B P R 42.1 16.9 39[41.2] G: Approx. 300 H: Approx. 600 (Lead wire length) 103.2[107.6] (Light/surge voltage suppressor) 50.1[57.1] + 45 34.7 21.5 6 6 17 17 15 8.5 1/8 (P, R port) 32 24 45.5 L plug connector (L): 10-SYJ5 43-L-01 3 4 5 M plug connector (M): 10-SYJ5 43-M-01 3 4 5 DIN Terminal (D): 10-SYJ5 43-D-01 3 4 5 M8 connector (WO): 10-SYJ5 43-WO-01 3 4 5 Applicable cable O.D.

Table of Contents

L4 D1 L3 D2 M Connecting thread T L1 L2 Model Applicable tubing O.D.d T Uni thread H D1 D2 L1 L2 L3 L4 A Max.

VFS

Please connect with corresponding power side. 01 VV5FS2 1 06 01 Nil N Rc NPT NPTF G Symbol T Series VFS2000 Manifold Passage Porting specifications A, B EA, EB P F Symbol Option Port size 1 2 Side Bottom Plug-in type With attachment plug lead wire Common Common Symbol 01 02 A, B P, EA, EB 3 Side Bottom Individual Common 1 8 Rc Rc Rc M Mixed VK 4 Stations 1 4 1 4 5 Side Bottom Common Individual

Modular F.R.L. Unit

OUT IN OUT IN A G H H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.