3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

port 46.5 L plug connector (L) M plug connector (M) Cover dia 1.5 Cross section 0.23mm2 (Lead wire) 66(71) 300 (Lead wire) Indicator light 300 61(64.5) Indicator light 55.5(56.5) 49(50) Cover dia 1.5 Cross section 0.23mm2 P R 1 3 P R 1 3 : AC : AC Dimensions n: Station (Max.20) Equation L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

SMC Pneumatic Clean Series

style (G) / CBM2G, CBM2G Relief port M5 x 0.8 24 H2 DL Width across flats B1 2-P (Rc, NPT, G) Standard port Width across flats B2 H1 C2 NN HC Eh8 D I B G N F 1.5 Relief port M5 x 0.8 MM G N A K AL Width across flats NA 2-FD (This drawing shows the cases of 20 and 25.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

R R ot ot at at R io io ot n n at ra ra A io n gl e n n n a g dj g ra us e e ti A ng A n of n g ng of gl e di e le k re of k a e ad dj ct e y ke us io ju y n st gr ti y gr n in g o gr g o o di oo di o v re re v e ve ct e ct io 9 io 9 18 n 0 n 0 0 Angle adjusting screw The rotation range under the adjustment of an angle at 120 is indicated below.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators M5 x 0.8 Relief port (10-, 21-) Vacuum port (11-, 22-) GC GB X 2 x LD 2 x P (Rc, NPT, G) GA H1 Y Width across flats B1 I NDh8 D B LH N MM Width across flats KA L LX H K A AL 3 ZZ + Stroke S + Stroke N Thread depth A1 Female thread MM (mm) Female Rod End A1 10 10 10 10 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 MM 86 86 88 114 ZZ Bore size 8 8 12

Intrinsically Safe Valve

L 156 M5 x 0.8 (Pilot EXH port) Manual override 17.6 109.7 33.7 EA P EB PE X A A A A 24 23.6 20 20 65.4 5.3 20 29 7.3 68 39 B B B B 6 x 1/4" {P(1), EA(5), EB(3) port} 46.3 M5 x 0.8 (External pilot port) (Pitch) P = 17.5 21 L1 L2 5 Stations 1 n 2 47.5 53 38 27.3 8.5 9.8 2n x 1/4" {A(4), B(2) port} (Pitch) P = 17.5 19 L (Lead wire length) L-type plug

CG5-S

Flat type/CJ-CF MM Double clevis type cylinder A 7 TH 4-TC C0.5 +0.2 0 TU D D 0.1 0.3 TN C0.5 12 N W L TX TV TK Round type/CJ-CR MM TDH10 A TY TT C0.5 TW RR L N Material: SUS304 W Part no.

VFR

VFN Stations n: Station 2-Rc 1/8 (PE port) 6-Rc 1/2 (P , EA, EB port) 2 156 168 3 199 211 4 242 254 5 285 297 6 328 340 7 371 383 8 414 426 Formula L1 = 43 x n + 70 L2 = 43 x n + 82 L L1 L2 Non plug-in type Manifold VV5FR4-10Station 1Port size U side Applicable cable O.D. 8 to 10 Manual override (Non-locking) P = 43 (Pitch) (Pitch) P = 43 Stations 2n-Rc 3/8 (A, B port) 2n-Rc 3/8, 1/2 (A,

Table of Contents

(Thread symbol N: 3/8 inch) (820) [200 VAC specification] Terminal block K L H M N J 4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

VQ7-6/7-8

PA PB P R2 R1 67 40 (41.5) 38 (27) 6-Rc1/2, 3/4 1 5 3 SMC 32 (35) 32 (35) 35 35 L: Dimensions Fomula L n 10 9 8 7 6 5 4 3 2 1 Port P, R1, R2 n: stations L1 = 56n + 64 L2 = 56n + 80 n: stations L1 = 56n + 90 L2 = 56n +1 06 L1 624 568 512 456 400 344 288 232 176 120 Rc1/2 L2 640 584 528 472 416 360 304 248 192 136 L1 650 594 538 482 426 370 314 258 202 146 Rc3/4 L2 666 610 554 498 442 386 330

MXS Series Air Slide Table

) MXSIL Series Dimensions MXS 12 L /Symmetric type ZZ Z Basic type 0.5 28.5 32 8 M 4H9 3.5 deep +0.030 0 N 16 -1 X F 2 2-M5 X 0.8 thread 8 deep 4-M4 X 0.7 thread 6 deep 16 F 4H9 3.5 deep +0.030 0 15 (With stroke adjuster at extension end) 50 28 38 20 5 1 N-M4 X 0.7 thread 5.5 deep (Helisert) 5 9 Stroke adjuster at retraction end 31.5 (With stroke adjuster at extension end) Stroke adjuster

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

125

(Station n) (Station 1) VVEX4-1 (Internal pilot) 83.3 A A 62.8 47.5 P R 13.5 38.5 P=46 n x Port 2(A): 1/4, 3/8 L Dimensions L1=46n+31, L2=46n+15 n: Stations Station L dimension 2 3 4 5 6 L1 123 169 215 261 307 L2 107 153 199 245 291 1736 VEX3 Series Specific Product Precautions 1 Be sure to read this before handling the products.

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.