o (M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?
(M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?
(M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?
S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.
Note 2) To insert the T-nuts, remove the covers at both ends of the body and insert them into the T-slots.
) (52) The dimension inside [ ] shows the location at which the home position switch operates. 58 28 N x P 5 U 36: T-slot pitch 20 N C 1 0.2 (5.1) 10 5.8 4 5.5 36 10.5 6.5 6.5 1 3 39 28 3.3 T-slot A 4H9+0.030 0 depth 4 C 4H9 +0.030 0 depth 4 Work piece mounting reference plane Body mounting reference plane T-slot A dimension T-slot B dimension L-M6 6.5 Refer to cross section C-C. 27.5 T-slo
Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !
KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5
A: Orange B: Green (P , EA, EB port) 2-M5 x 0.8 (Pilot EXH port)
3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 6 P. 12 Straight Union KQG2H Extended Male Elbow KQG2W Union Y KQG2U Metric Inch P. 3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 7 P. 12 Male Elbow KQG2L Different Diameter Tee KQG2T Metric Inch P. 4 P. 10 Metric Inch P. 5 P. 11 Female Connector KQG2F Metric Inch P. 7 P. 13 Male Branch Tee KQG2T Plug-in Reducer KQG2R Metric Inch P. 4 P. 10 Metric
MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150
T nuts provided by P/A.
27.5 2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H
Cushion N Rubber bumper Single acting/Spring return Single acting/Spring extend S T Cylinder stroke (mm) Bore size 20mm 25mm 32mm 40mm Refer to p.1.7-21 for Standard Stroke Table. 20 25 32 40 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.
+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from
msec T msec Bellows seal 200 200 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main valve Initial exhaust valve 600 600 400 400 Smooth exhaust valve T msec T msec 200 200 0
P P P P P P P P SY5000 P P P P P P P P SY5000 P P P P C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9
connector (for SI unit) P. 1672 o Power cable with connector P. 1677 q Communication cable with connector P. 1671 Connection example of the SI unit compliant with PROFIBUS DP Connection example of the SI unit compliant with AS-Interface u Power block P. 1674 t End plate (Input side) P. 1673 u Power block P. 1674 y Output block P. 1674 t End plate (Input side) P. 1673 SI unit y Output
0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !