CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

AC Servo Motor Driver

PG1 Model loop gain P PB08 PG2 Position loop gain P PB09 VG2 Speed loop gain P S PA08 ATU Auto tuning mode P S PB10 VIC Speed integral compensation P S PA09 RSP Auto tuning response P S PB11 VDC Speed differential compensation P S PA10 INP Control mode, regenerative option selection P PB12 OVA Overshoot amount compensation P S PB13 NH1 Machine resonance suppression filter 1 P S PA11 TLP

LX

(mm/s) Ultimate speed (mm/s) Transfer load 6kg Transfer load 6kg 3kg 50 50 50 3kg 1.5kg 4kg 0kg 0kg 2kg 0kg 0 0.05 0 0.1 0.2 0 0.05 Time (s) Time (s) Time (s) LXPB5SB/LXSH5SB LXFH5SB LXPB2SB/LXSH2SB 200 200 200 Transfer load 4.5kg Ultimate speed (mm/s) Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load 4kg 3kg Transfer load 2kg 2kg 100 100 100 1.5kg 0kg 0kg 0kg 0 0.05 0.1 0 0.05 0.1

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine

Electric Actuator/Slider Type

Model L A B n D E LEFS40 S -200453.4 6 2 LEFS40 S -300553.4 6 2 LEFS40 S -400653.4 8 3 LEFS40 S -500753.4 10 4 LEFS40 S -600853.4 10 4 LEFS40 S -700953.4 12 5 LEFS40 S -8001053.4 14 6 LEFS40 S -9001153.4 14 6 LEFS40 S -10001253.4 16 7 378 478 578 678 778 878 978 1078 1178 206 306 406 506 606 706 806 906 1006 300 300 450 600 600 750 900 900 1050 SMC Corporation of America 10100 SMC Blvd.,

CL

Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

Fieldbus System

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

CG5-S

WH (E1) D B2 BZ MM AL A K Plug bolt (4 pcs. included) KA 8-J (F1) C 0.1 S + Stroke ZZ + Stroke H NA (mm) Stroke range A Bore size (mm) NA AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM P S 20 29 to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 M5 x 0.8 83 25 29 to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com LW EB EA 2-P HC HP H HB HA HG HT NT Square nut for body mounting J 8 PP A N W Z + Stroke TW NL (mm) Model A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16

Aluminum High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

Electric Actuator with Integrated Guide

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting

ZX

27 20 8 Bracket B Standard accessory (Mounting hole) M5 (or M6) (PD port) External release port plug Note 1) M5 (or M6) (P port) Air supply pressure port (55.4) 5.4 8 Air supply 1 (Mounting hole) (or M6) Vacuum pad connection port Note 1) Remove the plug at external release.

MXQ

Rubber stopper (P. 8-5-40) Metal stopper (P. 8-5-43) Basic style 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 3 11 Max. 12 (Retraction end adjuster) 12 I J 5.5 11 5.5 11 Adjuster at extension end N-M5 x 0.8 thread depth 6 36.5 (Adjuster at extension end) 11 5.5 5H9 depth 5 +0.030 0 Retraction end adjuster 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.