Prevents Micro-Bubbles

L type L and M type fitting assembly procedure t Fitting nut r Tubing VC Turn the lever q and move to SET POS. 1 u Knob w Insert pin assembly Place the insert bushing e on the insert pin assembly w. 2 VDW e Insert bushing Space VQ Cut the end of the tubing r at a right angle and pass it through the fitting nut t.

Micro-Mist Separator with Prefilter Series AMH

Bracket (Option) Optional Specifications J: With drain guide u I T: With element service indicator T Maintenance , Drain space Dimensions with mounting bracket E~ment service indicator B E F G H I J Model Port size A C D K L M N 0 P Q R S T U 5 9 5.5 35 54 70 26 4.5 1.6 24 37 AMH150 1/8, 1/4, 3/8 159 20 63 20 76 20 76 20 90 20 90 20 106 20 106 20 122 20 160 10 166 56 15 10 187 66 20 10 187

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PT ports lfeuin-in magna (l-lopuo* ilq-hoa a""t N J K aorh .!

Air Pilot Operated

@nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

MQQ M 16 0.090 J RHC Standard Stroke MK(2) Precautions Bore size (mm) Standard stroke (mm) RS Q G 10 15, 30, 45, 60, 75, 100, 125, 150 Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

MQQ M 16 0.090 J RHC Standard Stroke MK(2) Precautions Bore size (mm) Standard stroke (mm) RS Q G 10 15, 30, 45, 60, 75, 100, 125, 150 Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Table of Contents

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) A B C D E F G H I J Y A B C D E F G H I J Y Model Model ZPX40HBJ25-01-A18 ZPX63HBJ25-01-A18 109 160 120 171 50-01-A18 50-01-A18 144 195 155 206 40 41 28 43 20.5 32 47 69 13 63 65 46 68 31.5 43 58 80 21.5 75-01-A18 75-01-A18 180 231 191 242 ZPX50HBJ25-01-A18 ZPX80HBJ25-01-A18 112.5 163.5 125.5 176.5 50-01-A18 50-01-A18

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

VXA21/22

Option Symbol and Configuration Fluid and Options Option symbol and body material Brass Stainless steel Option Symbol Seal material Body material Holder material (Driving parts) Fluid(Application) V M Silicon oil A H Standard A B G H J M (Non-leak) N P V (Non-leak) NBR FPM EPR NBR FPM EPR FPM FPM EPR FPM Vacuum (Up to 103Torr) Fuel oil (Up to 60C) Brass A H Polyacetal V M Insulating oil A

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

B T 0604 20 Refer to Best Pneumatics No. 6 for details on valves.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

B 2 x 4-MM thread depth M 4-J x E (Depth) H 2-P (Piping port) Counterbore depth C Y T T HA CB L HP Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com TC F X WP GW GP WS D QW PW 4-LD W K With switch rail Plug HS G Q + Stroke Z + Stroke HR CR Area E (Area E) CY1R50/63

HRX-OM-R005

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R005 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Soft Start-up Valve

Y200-T-D Y300-T-D Y400-T-D Y600-T-D Spacer part no. Y200-D Y300-D Y400-D Y600-D Torque 0.36 1.2 1.2 2.0 0.036 0.05 0.05 0.1 6. Lockout type handle operating load and moment control Please do not apply excessive load to the handle when operating the valve switching, when using this product (lockout type) by connected to the outlet side of the F.R.L. combination.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.