A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Floating Joint

0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 180 200 180 200 Caution Maintenance Warning 1.

LEC-OM07605CN

PF25 SEMI-F47 (Tough Drive)] [AL.10.1] 0h x _ _ _ 0h PA21 *AOP3 A-3 _ _ _ x 0 1 0(MR Configurator2) 1h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h PA22 **PCS _ _ _ x 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0 1 2 [AL.37 ] 0h 5 19 5. [] PA23 DRAT _ _ x x 0 0 00h x x _ _ 0 0 00h [AL.50 1]5000 [AL.50.3 4]5003 PA24 AOP4 A-4 _ _ _ x 0 1: 3 2 23(_ _ _ 1) (_ _ _ 2)) 2 3 3 0h _ _ x _ 0h _ x _ _ 0h x

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E GC GA Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface GB Piping port M5 x 0.8 D LY LB LH NB H NA A LZ LX Head cover port location Axial (R) LT Y X 2 x LC Mounting hole Z + Stroke S + Stroke The overall cylinder length does not change.

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

Modular Type Filter Regulator Series AW

8 C J N R W Z AW10 AW30 to 40 B C D E G H 1 2 6 8 C J N R W Z Accessories Optional specifications 56 AW10 to 40 Standard specifications AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 Air 1.5MPa 1.0MPa 0.05 to 0.85MPa AW40 1/4, 3/8, 1/2 AW40-06 3/4 Model Port sizes Fluid Proof pressure Maximum operating pressure Set pressure range Pressure gauge port size Note 1) 0.05 to 0.7MPa Rc 1/16 Note 2)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

JA JB JC JD K NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x

Rotary Table/

JA JB JC JD K NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x

REC

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

5 M5 type U10/32 type M5 type U10/32 type e !0 i t !1 !6 w y r 17 Gasket M5 type only Stainless steel !3 Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) The material of the lock nut option-J (round type) is brass. However, note that only the AS231FM uses steel. Note 3) The surface treatment of the lock nut option-J (round type) is electroless nickel plated. !2 q o !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M5 x 0.8 3.0 8 LEYG32M L M6 x 1.0 5.2 10 25ALEC LEC S LEC SS-T LEC Y LEC Y 3.

240

NS 14 14 24 24 30 30 45 55 60 LT 49 49 59 59 69 69 79 89 99 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 25 MXH Series Dimensions: 16 LT 16 24 14 LA LB J x M4 x 0.7 Depth 6 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 4 x M4 x 0.7 Depth 10 2 x M5 x 0.8

Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting

MXH

6 60 30 108 60 30 6 8-2-17 16 Series MXH Dimensions: MXH20 LT 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 3-M6 x 1.0 through Bottom hole dia 5.1 6-9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Modular Type Air Filter Series AF

AF20 D Float type auto drain (N.O.) 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard J Drain guide 1/4 AF30 R Flow direction: Right to left W Drain cock with barb fitting: 6 x 4 nylon tubing Name plate and caution plate for bowl in imperial units (PSI, F) AF40 Z Standard specifications AF20 AF10 AF30 AF40 AF40-06 AF50 AF60 Model 1/8, 1/4 Port sizes M5 x 0.8 1/4, 3

80

15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 2 x J thread depth K VCH VDW VDW Body material Stainless Steel SX10 2 x 3.4 Mounting hole W Y Grommet VQ LVM X U D 300 Q F Full wave rectifier (AC type) [mm] C R E G Mounting method Model Port size P A B B1 C D E F J K M VDW1 M5 12 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 15 22 11 51.7 20 8 13.5 M3 5 15 B B1 2 x P Port size A Mounting bracket

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.