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y Return spring Stainless steel CAC406 u Body Dimensions: Bracket A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

Modular Design with Uniform Body Style

E E1 E2 E3 E4 J AR20-mmm -D to AR40-mmm -D 2 x P1 (Port size) Panel cutout dimensions A Y W C B Q V K OUT IN IN OUT Z R Plate thickness AR20-D to AR30-D : Max. 3.5 AR40-D to AR40-06-D : Max. 5 F S M J D U Bracket (Option) T N Square embedded type pressure gauge Right angle square type pressure gauge E E1 E2 E3 E4 -D to AR60-mmm E E1 E2 E3 E4 -D AR50-mmm J J A 2 x P1 (Port size) Center of

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0 y !3 !5 @3 !0 !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination of up to two XAs are available.

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K Y A J K B Y C D Misc.

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1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

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y y e e r r r u u u Drain Drain Drain Component Parts Material No.

ZP

Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-A18 ZPX63HBJ25-B01-A18 109 160 120 171 50-B01-A18 50-B01-A18 40 41.4 28.4 43.2 20.5 32 47 69 13 63 65.1 45.5 67.6 31.5 43 58 80

Made to Order

Applicable rod end nut Bore size (mm) I type single knuckle I-12 I-14 I-16 I-18 I-20 I-25 I-30 Y type double knuckle Y-12 Y-14 Y-16 Y-18 Y-20 Y-25 Y-30 I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 180 200 250 300 NT-12 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 125 65 100 181 18 CS1 CS2 125 65 105 186 18 140 76 110 198 21 155 83 125 223 23 -X -X 160

Battery-less

With motor cover: LEYG16DmE -mC A B C H Dimensions (Size 16) U 35 Motor cover direction H D1 42.3 D2 42.3 D3 55.1 D4 47 A + Stroke Y X2 Cable length 250 With lock/motor cover: LEYG16DmE -mW A B C Motor Cover Direction Cable length 350 D1 D2 J J J J J J J J 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 30.3 22.2 J 30.3 22.2 J 30.3 22.2 J 22.2 30.3 J 22.2

ZP3

Type/ZP3-Y ZP3-Y(J/K)-B ZP3-YJP-B ZP3-YK(15/20)-B ZP3-Y-(02/04/06) ZP3-Y-(U2/U4/U6) Vacuum inlet o o y y t t Vacuum inlet u u i y t Component Parts u No.

Modular F.R.L. Units

When the above factors are present, or there is some doubt, use a metal bowl for safety. 86 AL10-A to AL60-A Series Construction AL10-A AL20-A w q t w q e OUT IN OUT IN y r u y u AL30-A/AL40-A AL50-A/AL60-A w q t w q t e e IN OUT IN OUT r y u r i y u Component Parts No.

Air Cylinder

0.4 J 0.65 J 1.2 J Rubber bumper CM3 Female thread 0.11 J 0.18 J 0.29 J 0.52 J Allowable kinetic energy Male thread 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion CG1 (Effective cushion length (mm)) Female thread 0.11 J 0.18 J 0.29 J 0.52 J Refer to pages 262 to 266 for cylinders with auto switches CG3 * Operate the cylinder with in the allowable kinetic energy.

Possible to transfer a workpiece at low-speed.

XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

SQ1000/2000

COM specification Y: Low power consumption specification 60 Series SQ1000/2000 Exploded View of Manifold/SQ1000 (Plug-in Type Manifold) SS5Q13 (F, P, J, L, S kit) SUP/EXH block assembly Valve and manifold block assemblies U side end plate assembly D side end plate assembly y F kit L kit S kit P (J) kit !

ZP

K Y A J K B Y C D Misc.

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Smooth Cylinder/Low Speed Cylinder

L1 1273-1 A Series CQ2X Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface material: Nickel plated Material: Cast iron Surface material: Nickel plated Material: Carbon steel

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

5

x LD 4 x LD D D E E B C B C LY LH LY LH Width across flats KA Width across flats KA LT LT ZZ + Stroke LS + Stroke S + Stroke N X Y ZZ + Stroke LS + Stroke S + Stroke N X Y N X Y N X Y LX C B LX C B (mm) Bore size (mm) A AL B B1 C D E F G H H1 J K KA LD LH LS LT 40 30 27 60 22 44 16 32 10 15 51 8 M8 x 1.25 6 14 9 40 138 3.2 50 35 32 70 27 52 20 40 10 17 58 11 M8 x 1.25 7 18 9 45 144 3.2 63