Aluminum High Vacuum Angle Valve Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.
(Values at the initial period) Series VP500 Solenoid Specifications DIN terminal (D) DIN (EN175301-803) terminal (Y) Conduit terminal (T) Grommet (G), (H) L-type plug connector (L) M-type plug connector (M) Electrical entry G, H, L, M D, Y, T DC AC (50/60 Hz) 24, 12 24, 100, 110, 200, 220, 240 10% of rated voltage Coil rated voltage (V) Allowable voltage fluctuation Series VP700 Standard
(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,
Elbow: KPL H D 2-Applicable tubing Effective area mm2 Note 1) D Model L Applicable tubing O.D. mm Weight g M Q D TPH TPS M M L Q L Q KPL04-00 20.7 4.5 18 3.5 3.5 3 10.4 4 MS KPL06-00 22.8 5.3 19.5 9 9 7 12.8 6 D KPL08-00 26.3 6 21.5 22 15 11 15.2 8 T 4.2 KPL10-00 29.4 6.8 24 35 25 16 18.5 10 M 8 KPL12-00 L 31.4 7.5 25 50 40 20 20.9 12 VMG Note 1) D indicates the maximum diameter.
Cushion seal L Guide gasket M Piston gasket Replacement Parts: Lock-up Unit K, L and M are non-replaceable parts, so they are not included in the seal kit.
Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q KPL04-00 20.7 4.5 18 3.5 3.5 3 10.4 4 KPL06-00 22.8 5.3 19.5 9 9 7 12.8 6 D KPL08-00 26.3 6 21.5 22 15 11 15.2 8 4.2 KPL10-00 29.4 6.8 24 35 25 16 18.5 10 M 8 KPL12-00 L 31.4 7.5 25 50 40 20 20.9 12 Note 1) D indicates the maximum diameter.
m 100 l 50 mm l 50 mm 25 Mass of transferred object: m (kg) 20 10 When selecting a model with a longer l dimension, be sure to choose a sufficiently large bore size.
Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.
Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.
121 162 196 M 5.4 6.5 8.5 R 26 35 47 N 8.4 8 10.5 Q 2.3 2.3 2.3 L 22 23 26 P 40 53 70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 36 38 40 G 57 73 H 28 30 35 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AL20 AL30 AL40 5 4 6 S F 3 7 8 2 9 1 W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A E H L IN OUT Bracket (Optional) D Sight glass assy not applicable
(mm) A B C D G H K L M N R S1 S2 T U V W X Y E (g6) F (h9) Model CRBU2WU15-D 0 0.043 5 0.004 0.012 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 34 25 21.2 18 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 42 34.5 25 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 4.5 50 47.5
P PROFINET D DeviceNet L IO-Link M CC-Link Ver. 1.10 For single axis 1 Produced upon receipt of order 2 The DIN rail is not included.
Stopper (mm) Adjustment bolt Model Stroke adjustment range L L CY1H10, CY1H15, 0 to 15 CY1H20 CY1H25, CY1HT25, 0 to 30 CY1HT32 57 58 Series CY1 Auto Switch Specifications Auto switch application table Auto switch part number Cylinder model CY1R CDY1S CY1L CY1H D-A72, D-A73, D-A80 Reed switches Solid state switches D-A72H, D-A73H, D-A76H, D-A80H D-A73C, D-A80C Note 1) D-A90, D-A93, D-A96
Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.
a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2
R L R L R L R L LE-D-1-1 LE-D-1-2 LE-D-1-3 LE-D-1-4 Lead screw pulley Motor pulley Spacer Origin stopper Bearing Belt Guide unit GR-S-010 (10 g) GR-S-020 (20 g) 13 Electric Slide Table/Compact Type Series LES Model Selection Specific Product Precautions Construction: In-line Motor Type/D Type @1 @3 @2 e u o !8 !1 r y !
F CRQ2X MSQX BC CB CB BC U UU MRQ A port B port C BB BB M 2 x Port size N A SB BA BA 0 0.2 G S D (g6) L 0 0.2 D is the shaft dimension.
Model CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 CY1H10 Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t Nm 4.4 1.37 2.65 13.2 Tightening torque Square nut l t 4.
A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60