Possible to transfer a workpiece at low-speed.

CRB1 Formulas QCR = 2V x x 10 -3 P + 0.1 0.1 MSU QCP = 2 x a x L x x 10 -6 P 0.1 CRJ Formulas CRA1 QC = QCR + QCP Qc2 = Qc x n x Number of actuators x Reserve factor CRQ2 QCR = Air consumption of rotary actuator [L (ANR)] Qc2 = Compressor discharge flow rate n = Actuator reciprocations per minute Reserve factor: 1.5 or greater [L/min (ANR)] QCP = Air consumption of tubing or piping [L (ANR

Air Slide Table

Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

MXQ

Area: (800) 258-9200-www.stevenengineering.com (mm) Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model B C F G M D E L E1 P *1) H J K Q 1) MXQ8(L) M3 x 12 M8 x 1 MXQ-BS8(L) M3 x 12 20 7 24.5 14 12.5 40.8 5 12 1.4 16.6 8 12 14.6 MXQ12(L) M4 x 12 M8 x 1 MXQ-BS12(L) M4 x 12 18 9.5 29 14 11 40.8 6 12 1.4 20.5 11 13 18.5 MXQ16(L) M5 x 16 M10 x 1

Electric Actuator

L : Stroke [mm] V : Speed [mm/s] a1: Acceleration [mm/s2] a2: Deceleration [mm/s2] T1 and T3 can be obtained by the following equation. T1 = V/a1 = 300/3000 = 0.1 [s], T1 = V/a1 [s] T3 = V/a2 [s] T3 = V/a2 = 300/3000 = 0.1 [s] The acceleration and deceleration values have upper limits depending on the workpiece mass and the duty ratio.

Thermo-con/Rack Mount Type

) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine

Card Motor

) (80) L 5 m Wiring Diagram Terminal no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

215 Electric Actuator/Guide Rod LEYG Series p. 215 Electric Actuator/Slider LEF Series p. 31 Electric Slide Table LES/LESH Series p. 307 Electric Rotary Table LER Series p. 399 Electric Actuator/Miniature LEPY/LEPS Series p. 369 Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series p. 425 * Order the actuator separately, including the actuator cable.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Shaft Pattern Sequencing I Applicable shaft type: S, W, Y How to Order F59 B C P D C S 50 90 X RA1 A2 A24 C10 -X6 Built-in magnet Auto switch Nil D None Built-in magnet Refer to page 11-7-13 for the part no. of auto switches.

Table of Contents

O K L XA, depth XB J Q MHC NB M MHT G I NA 3-UA thread depth UB P .C.D.R (Mounting thread) 3-SA, counterbore dia.

OMR0032

Controller Set Up (P.42) and 14. Card Motor Controller Configuration software (P. 70) for instructions on how to setup. (7) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.50) and 14.5 Monitor/Test window (P. 80) for instructions on operating instruction of test operation 14 - 3.

CRQ2

P = Thread pitch M3 x 0.5; M4 x 0.7; M5 x 0.8; M6 x 1 Enter the desired figures in the portion of the diagram. XA1 to XA24 are the standard products that have been additionally machined. Chamfer face of the parts machining additionally is C0.5. CRB2 2. CRBU2 L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M 3. CRB1 L2 + (3 x P) L2 + (3 x P) 4. MSU L1 = L1 = L2 = L2 = CRJ 5.

CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

Bracket mounting inserts found on the standard ISE20B are omitted as well.  25A-ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

Bracket mounting inserts found on the standard ISE20B are omitted as well.  25A-ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

The ISE20B-S is a digital pressure sensor with all standard features of the ISE20B, while integrating an M12 connection. M12 permits a stable connection for sensor installations outside a cabinet. The sensor has an informative, easy to read 3 screen, 3 color display.

OMR0031

Controller Set Up (P.34) and 14. Card Motor Controller Configuration software (P. 57) for instructions on how to setup. (6) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.41) and 14.5 Monitor/Test window (P. 68) for instructions on operating instruction of test operation 14 - 3.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.