30

22 24.6 28.8 D M L A D Q N O M M L L Note 1) D is maximum diameter.

Rotary Actuator/Vane Type

to 14 0.5 to 2 Y-1 L2-1 15 5.5 to 18 0.5 to 2.5 Y-1.5 L2-1 20 6 to 20 0.5 to 3 Y-1.5 L2-1 30 8.5 to 22 0.5 to 4 Y-2 L2-2 40 13.5 to 30 0.5 to 5 Y-4.5 L2-2 Shaft type CRQ2 Size MSQ MSZ CRQ2X MSQX Symbol: A47 Symbol: A49 MRQ Machine a keyway into the long shaft.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L n Internal Pilot Manifold L Dimension n: Stations 2 3 4 5 6 7 8 9 10 L1 L2 L3 L4 160.5 173 185.5 185.5 198 210.5 223 235.5 248 150 162.5 175 175 187.5 200 212.5 225 237.5 128.6 139.1 149.6 160.1 170.6 181.1 191.6 202.1 212.6 16 17 18 12.5 13.5 14.5 15.5 16.5 17.5 L n External Pilot Manifold L Dimension n: Stations 2 3 4 5 6 7 8 9 10 L1 L2 L3 L4 173 185.5 185.5 198 210.5 223 235.5 248 260.5

KJ

Branch Y: KQ2U Model H (Width across flats) D M L A Weight (g) Applicable tubing O.D.

Compact Rotary Actuator Series CRQ2

Applicable shaft type: Y X = Long shaft side W1 = L1 = L3 = Short shaft side X = W2 = DSize 20, 30, 40 L2 = L4 = Y = (mm) (mm) W2 L2 max Y Y Y Y Y W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 Size 10 15

HRX-OM-I051

HRX-OM-I051 1stEditionJanuary.2005 Rev.May.2018 Operation Manual Original Instructions Thermo-Chiller HRZ001-L HRZ002-L HRZ004-L HRZ008-L HRZ001-L1 HRZ002-L1 HRZ004-L1 HRZ008-L1 HRZ001-L2 HRZ002-L2 HRZ004-L2 HRZ008-L2 HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S Save This Manual Carefully

Proposals for Energy Saving

min or l).]

0.55

EB EA M5 x 0.8 [5(EA), 3(EB) port] 11 (Pitch) P = 27.5 18 68.5 L: Dimensions 137.1 n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 L1 L2 74.5 64.5 102 92 129.5 119.5 157 147 184.5 174.5 212 202 239.5 229.5 267 257 294.5 284.5 322 312 349.5 339.5 377 367 404.5 394.5 L n 15 16 17 18 19 20 L1 L2 432 422 459.5 449.5 487 477 514.5 504.5 542 532 569.5 559.5 Unless otherwise indicated, dimensions

VQ4000

n Dimensions 8 263 276 L1 L2 7 238 251 8 263 276 L1 L2 6 213 226 7 238 251 5 188 201 6 213 226 4 163 176 5 188 201 3 138 151 4 163 176 1 2 113 126 3 138 151 1 2 113 126 88 101 88 101 L n L n 9 288 301 15 463 476 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 9 288 301 16 463 476 15 463 476 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 16 463 476 L1 L2 L1 L2 2-5-37 Base Mounted

One-touch Fittings

Q D M L 1: D is maximum diameter.

3 Port Air Operated Valve Series SYJA300

wire length) L1 L2 4.5 (Station n) (Station 1) (Light/Surge voltage suppressor) (Station n) (Station 1) 54.1 [61.1] + + + + 38.7 25.5 A A 19.2 9.4 21 (Pitch) P=17 21 1/8 (A port) 19.2 9.4 A A 18.5 (Pitch) P=16 21 M5 x 0.8 (A port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 49 49 49 49 P R P R P R P R 57.2 [59.4] 67 [69.2] 52.2 58.7 66.1 76.1 Max. 10 77 Pg7

Electric Actuator

Table Displacement (Reference Value) W L 0.08 LEF32 (L = 30 mm) 0.06 Displacement [mm] LEF25 (L = 25 mm) 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 0.02 0 0 100 200 300 400 500 Load W [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

AC Servo Motor Driver (Network card type ）

(a) Delta connection For the 3-phase (L1/L2/L3) delta connection, an instantaneous power failure occurs in the voltage between a pair of lines (e.g. between L1 and L2) among voltages between three pairs of lines (between L1 and L2, L2 and L3, or L3 and L1).

Possible to transfer a workpiece at low-speed.

Applicable shaft type: K X = Long shaft side W1 = L1 = L3 = DShort shaft side X = W2 = Size 20, 30, 40 L2 = L4 = Y = (mm) (mm) X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 W2 L2 max Y Y Y Y Y L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 Size 10 15

Rotary Actuator

(Example) For M3: L1 = 6 mm $The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

VFS

= 25 x n + 106 10 345 356 9 320 331 8 295 306 7 270 281 6 245 256 5 220 231 4 195 206 3 170 181 2 145 156 1 120 131 L L1 L2 Terminal mounting stations are not included.

Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 KS K S T V KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 61 76 76 99 L1 41.5 55 55 72.5 L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L3 43 57 57 75 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 57 74 74 95 L2 61 76 76 99 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57

AC Servo Motor Driver

OUTLINE DRAWINGS (2) LECSB-S8 [Unit: mm] 6 mounting hole 5 Approx.80 6 170 156 6 6 CN5 CN6 CN3 CN1 CN2 CN2L CN4 CNP1 L1 (Note) (Note) L1 L2 L3 N P1 P2 P C D L 1 1 L 2 1 U V W L2 L3 N P1 CNP2 P2 161 168 P C D L11 L21 CNP3 U V W CHARGE 6 Approx. 25.5 Approx.68 Approx.14 With MR-J3BAT With LEC-MR-J3BAT Note.

Modular F.R.L. Unit

72.5 L2 43 57 75 L1 41.5 55 72.5 L2 57 74 95 L1 41.5 55 72.5 L2 43 57 75 L1 41.5 55 72.5 L2 57 74 95 L3 43 57 75 L1 41.5 55 72.5 L2 57 74 95 AC20A AC30A AC40A AC40A-06 T S TV SV V Attachment Model L1 41.5 55 55 72.5 77.5 93 98 98 L1 28 41.5 55 55 72.5 77.5 93 98 98 L1 41.5 55 55 72.5 L2 43 57 57 75 L1 41.5 55 55 72.5 L2 57 74 74 95 L1 41.5 55 55 72.5 L2 61 76 76 99 AC10B