SMC Corporation of America
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Response time (1) 10 ms or less (AC), 45 ms or less (DC) 1,500 c.p.m. (AC), 180 c.p.m. (DC) Non-locking Max. operating frequency (2) VK Manual override Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

For LECSS, set [ms/div] and [Number of collection Div] to the horizontal axis (time axis). [ms/div] [Number of collection Div] will be [Measurement time]. Click of [ms/div] and set the DiV number. The unit ms of [Number of collection Div] is 1000ms1s. Click of [Number of collection Div] and set the time.

LECSB1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. L1 L2 L2 Main circuit power supply L3 L3 Regeneration converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.)

Pressure Range: 0 to 10 MPa, Piping: Rc 1/4, Orifice: None, Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T) JD0 1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02

EX260-SIL1 (in/out 0/4 bytes, COM2) 3.4 ms Process data minimum cycle time EX260-SIL1 (in/out 2/4 bytes, COM3) 1 ms EX260-SIL1 (in/out 2/4 bytes, COM2) 5 ms 0 byte input/4 bytes output 2 bytes input/4 bytes output (2 bytes input: Device State) (selectable) Process data length Number of outputs 32 outputs Vendor ID 83 hex EX260-SIL1 (in/out 0/4 bytes, COM3) 158 hex EX260-SIL1 (in/out 0/4

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

2 ms; 200 million cycles VQC2100: 20 ms 2 ms; 200 million cycles VQC4100: 17 ms 3 ms; 100 million cycles '-t t iS nge mounting screw Avai abe configurations lN.C.

or less (Standard), 15 ms or less (Low power consumption type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, If lubricated.)

(with polarity protection) Current consumption 40mA or less Switch output NPN or PNP open collector 2 outputs (To be selected) Maximum load current 80mA Max. applied voltage 28V (NPN output) Residual voltage Max. 2V (at 80mA load current) Response time 2.5 ms or less (response time available for anti-chattering function: 20, 100, 500, 1000 or 2000 ms) Short circuit protection Provided Repeatability

List part numbers of the installed valve and option in required station location separately under manifold part number. 2.1-10 Series SY100 Common SUP/Common EXH 30 Type How to Order Applicable solenoid valve (1) SS3Y1 30 05 F SY113-l-M3 SY113A-l-M3 Stations 02 Applicable blank plate assembly 2 stations ... ...

(max. 20 stations) Valve stations Supply/Exhaust block assembly fitting specifications Note Symbol 02 Stations 2 stations Double wiring specification Straight Nil L B Supply/Exhaust block assembly mounting position 08 02 Elbow fitting (upward) 8 stations Elbow fitting (downward) 2 stations Specified wiring (up to 16 solenoids are possible) U D B M U Side (2 to 10 stations) D Side (2 to

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

MS T VMG Applicable tubing O.D.

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Refer to page 3-13-4.) 10 ms or less (Standard), 15 ms or less (Low wattage type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)