Pilot Operated

N.O. 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 1 2 3 VXD21 VXD22 VXD23 Symbol Nil 2 Valve Symbol Nil 2 Valve N.C. N.O.

Electric Actuator/Slider Type

Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K [mm] LEYG L (Ball bushing bearing) [mm] LEYG M (Sliding bearing) X Size Stroke range (mm) L DB Size Stroke range (mm) L DB 25 15 to 110 91 10 115 to 190 115 195 to 300 133 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 (0.5) Section XX Z WB WA 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 32

Modular F.R.L. Units

33.8 3.5 50 75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC60-B 1 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional specifications Semi-standard specifications Metal

VZ100/300/500

N.O. 110 1/8 2.8 2.7 2.9 2.8 3.0 2.7 0.43 0.38 0.32 0.21 0.31 0.31 0.77 0.72 0.71 0.71 0.74 0.68 2.5 2.4 2.7 2.3 2.6 2.3 0.51 0.42 0.34 0.45 0.33 0.48 0.76 0.69 0.69 0.63 0.66 0.64 Body ported 160 (Without sub-plate: 110) 1/8 Base mounted (With sub-plate) 1/4 Note) Weight stands for grommet type. Option Description Foot bracket Part no.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Proposals for Energy Saving

VP542-D Series VP500 VP544-G Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) 100, 200, 12, 24, 48, 110 to 120, 220, 240 Note 1) Electrical entry VP742-T Series VP700 DC AC (50/60Hz) Rated coil voltage V VP744-E 24, 6, 12, 48, 100, 110 Note 1) 15% to +10% of rated voltage 5.6 (50Hz), 5.0 (60Hz) 3.4 (50Hz), 2.3 (60Hz) 1.8 or 2 (with indicator light) Power consumption

Electro-Pneumatic Positioner

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

0.4

N.C. 1 2 Note) 3 4 Note) 5 6 4-position dual 3-port valve (B) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 2-position double Metal Rubber 4 2 B Note) 1 5 3 N.O.

Electric Grippers

Compact Basic LEHZJ10L, LEHZJ16L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force/Trigger level [%] Pushing force/Trigger level [%] Pushing force and trigger level range Pushing force and trigger level range Pushing speed [mm/sec] Pushing speed [mm/sec] LEHZJ20L, LEHZJ25L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force

Modular/F.R.L. Units Series AC

66 201 86 30 55 80 29.5 28 27.8 38.5 49 42.5 76 1/4 1.5 42.5 145 76 239 92 38 72.5 110 37.5 1/4, 3/8, 1/2 28 27.8 3/4 38.5 49 42.5 76 1/4 1.2 42.5 155 76 242 93 38 77.5 110 37.5 28 27.8 3/4, 1 44.5 61.5 42.5 84 1/4 3.2 42.5 191 84 409 175 98 110 43.5 28 27.8 1 44.5 61.5 42.5 84 1/4 3.2 42.5 196 84 409 175 98 110 43.5 Optional specifications Semi-standard specifications Bracket mount With

Dual Rod Cylinder Series CXSJ/CXS

Standard Stroke Housing (mm) Plate Model Standard stroke Manufacturable stroke range CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 10, 20, 30, 40, 50 60 to 100 10, 20, 30, 40, 50, 75 80 to 150 110 to 150 10, 20, 30, 40, 50, 75, 100 6 to 32 Bore size (mm) CXSJM (Slide bearing) CXSJL (Ball bushing bearing) 110 to 200 Strokes beyond the standard stroke range are available as a special order. 0.1 CXSJ6

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Note 2) 110 and 115VAC are common, as are 220 and 230VAC. Note 3) Energy saving [0.22W] type is also available. Refer to page 1.2-177 for details. Note 4) AC specifications are only for the DIN terminal type.

VDW

In the case of 110/220 VAC, the VDW10 is 3 W and the VDW20/30 is 3.5 W. Note 4) Vibration resistance No malfunction when tested with one sweep of 5 to 200 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states.

AC Servo Motor Driver (Network card type ）

This is not supported by the driver. 18 110 18EtherCAT COMMUNICATION 18.5.8 Software position limit Specify the upper and lower limits of the command position and current position. If a command position exceeding the limit position is specified, the command position is clamped at the limit position.

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

Air Cylinder

With air cushion With rubber bumper GA WA GA E 0 0.05 E 0 0.05 (E1) (E1) TA (F1) ZZ + Stroke S + Stroke F TA (F1) ZZ + Stroke S + Stroke F (mm) Bore size (E1) E(F1) F GA S TA WA ZZ Rc NPT G Male thread Female thread 32 17 18 2 2 18 16.5 77 (85) 17 22 119 (127) 93 (101) 40 21 25 2 2 19 19 84 (93) 18 23 136 (145) 101 (110) 50 26 30 2 2 21 21 97 (109) 20 25 157 (169) 115 (127) 63 26 32 2 2 21

Aluminum High Vacuum Angle Valve

0 CE-compliant CE-compliant y Rated voltage u Electrical entry i Light/Surge voltage suppressor 1 100 VAC, 50/60 Hz Q CE-compliant Nil Nil S Z G H L M None With surge voltage suppressor With light/surge voltage suppressor Grommet (Lead wire length 300 mm) Grommet (Lead wire length 600 mm) L type plug connector M type plug connector 2 200 VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50

CL

110 120 263 258 307 300 327 319 379.5 402.5 382 405 419 440 Note) Bore size 40 and bore sizes 125 through 160 with auto switch are not available. 9-3-11

VZS

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

Soft Start-up Valve

VAC 100 VN SY100-82-2-01 200 VAC 200 VN SY100-82-2-02 110 VAC (115 VAC) 110 VN SY100-82-2-03 220 VAC (230 VAC) 220 VN SY100-82-2-04 When making connections, please note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure) standards.