Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

CLQ

For details, refer to page 9-15-39. 9-10-28

Rotary Table/

Measure B Moment of inertia (kgm2) Size 7 3 2 1 0.0001 0.001 0.01 0.1 MSQB7A MSQB3A MSQB2A MSQB1A 1 0.2 0.3 0.4 0.6 0.5 1.0 0.9 0.8 0.7 Rotation time (s/90) Model With external shock absorber Full size (Picture of MSQB1A) With internal shock absorber 73.5 50.5 60 56 A 34.5 41 30 28 A B For high energy 34.5 30.5 28 25 C For low energy With adjustment bolt 20.5 23 18 16 D mm Mass (g) 70 105 150

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-39 39 Date issued: Photo copying this page is recommended.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

MY1

Back port (Refer to page 39.)

Modular Design with Uniform Body Style

Size 50 V V Size 50 V V Size 60 V Size 60 V AC20B to AC60B Series AC20C to AC40C Series p. 23 p. 31 Air Filter Regulator + Regulator Air Filter Mist Separator + + AF AR AF AFM AR Port size 1/8 1/4 3/8 1/2 3/4 1 Port size 1/8 1/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 20 V V Size 40-06 V Size 30 V V Size 50 V V Size 40 V V V Size 60 V Size 40-06 V AC20D to AC40D Series p. 39

Intrinsically Safe Valve

Model Thread size Tightening torque 0.6 lbfft [0.8 Nm] 1.0 lbfft [1.4 Nm] 0.6 lbfft [0.8 Nm] 53-SY5000 53-SY7000 53-SY9000 M3 M4 M3 39 Series 53-SY5000/7000/9000 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Precautions and Handling Precautions for SMC Products (M-E03-3) for 3/4/5 Port Solenoid Valves Precautions.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y7-60Stations B 2 3 4 5 6 7 8 Stations (Station n) (Station 1) L1 160.5 173 198 210.5 235.5 248 273 58.6 (5.5) (Light/surge voltage suppressor) L2 150 162.5 187.5 200 225 237.5 262.5 (5.4) L3 128 147 166 185 204 223 242 L4 16 13 16 12.5 15.5 12.5 15.5 + + + + + Stations 9 10 11 12 13 14 15 [52.5] 49.1 L1 285.5 310.5 323 348 360.5 385.5 410.5 46 33.6 39 25.4 (10) (DIN rail dimension) L2

SFOD-OMT0009CN

-COM4 39 1) 29 N.C.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

45.5 55.5 103 121.5 145 M10 M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75,

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

High Vacuum Angle Valve, XL Series

63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

XL

63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

NCA1

150 150 2759 200 200 2760 250 200 2760 325 325 2761 400 325 2761 Stroke (In Inches and Hundredths of Inches) Bore 150 200 250 325 400 Note: Quantity is one piece.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

225 48 200 213 4 175 188 15 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 37.5 50 88 75 250 225 54 200 213 4 175 188 17 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 25 37.5 50 88 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125 275 51 75 112 250 64 12.5 25 37.5 50 100 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

For the DIN rail model number, refer to page 4-14-39.

OMR0031

Reduce the positioning time or increase the Load mass values in the step data. 9.6 Step Data setup (P.39) Card Motor does not reach the Check that the Basic Parameter Setup in the controller (Card Motor product number and mounting orientation) are correct.

3 Port Air Operated Valve Series SYJA300

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.