Series VQ Base Mounted Metal Seal/Rubber Seal

Refer to the each kit dimensional drawing for L dimension. VS VS7 (mm) L=12.5 X n+10.5 L dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ312M-l-M3 SYJ322-l-M3 SYJ322M-l-M3 How to Order SS3YJ3--20-05 -A Port M3 X 0.5 Stations Bracket Applicable blank plate ass'y SYJ300-10-1A 2 stations 02 Without bracket R Port With bracket F ... ...

CL

12 0.032 0.059 14 0.032 0.059 63.5 76.5 81.5 90 186 201 208 237 185 202 206 229 206 223 230 257 20 25 32 40 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 39 43 54.5 65.5 28 33 40 49 3.2 3.2 4.5 4.5 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 47.6 53 67.7 78.7 Clevis style: CLG1DN Clevis Style Bore size (mm) BZ CZ L RR TE TF TH TT TV TW TX TY TZ CDH10 8 0.058 0 10 0.058 0 12 0.070 0

Thermo-chiller/Rack Mount Type

min)/0.18 (at 7 L/min) For Option T: 0.42 (at 10 L/min)/0.4 (at 14 L/min) For Option MT: 0.32 (at 10 L/min)/0.32 (at 14 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 10/14 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option

Intrinsically Safe Valve

: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 12 14.7 91.8 Terminal type (TT) 53-SY7 20-TT-02 (-F2) 3 4 5 Max. 10 L (Lead wire length) 204.2 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 108.6 10 Series 53-SY5000/7000/9000 Dimensions: 53-SY9000 2-position single L-type plug connector (L) 53-SY9120-L02 03 109.3 6.5 (56.3) Insulator: Black () B 2 A 4 18.4 Insulator: Red (+) Manual override

MGP

10 MGQ 5 10 100 200 20 30 40 50 1 100 10 200 20 30 40 50 2 3 4 5 MGG Eccentric distance l (mm) Eccentric distance l (mm) MGC Over 75 stroke Over 125 stroke MGF 100 100 63 200 P=0.5MPa P=0.5MPa CY1 80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm) 3.17-9 Series

Compact Guide Cylinder

L [mm] Eccentric distance L [mm] MGPKL32 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 30 30 10 10 Load mass m [kg] Load mass m [kg] 1 0.1 1 10 100 100 10 Eccentric distance L [mm] Eccentric distance L [mm] 16 MGPK Series L L Plate Material Carbon Steel /MGPKL Horizontal Mounting m m MGPKL16 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load

Series IDG

min (ANR) (SCFM) Note 2) 10 (0.35) 125 (4.41) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM) Note 3) Bracket assembly (accessory) part nos.

A

NAM250-N03D 38 172 76 10 NAM350-N04D 12 204 90 10 S Y M B O L S NAM450-N06D 34 225 106 10 NAM550-N10D 1" 259 122 10 NAM650-N14D 112" 361 160 10 NAM850-N14D 2" 473 220 10 Manual and Autodrain types are same overall dimensions.

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REBH15/25 REBH15/25 REBH15/25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REBH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) REBHT25/32 REBHT25

REA/REB

11.5 14 8 PA N PB PW M JK L LD P J MM NN HT Model HS REAL15 REAL20 REAL25 REAL32 REAL40 95 5.6 8 7.5 45 70 75 9.5 M8 x 1.0 M5 x 0.8 M5 x 0.8 25 21 M6 x 1.0 10 90 120 10 50 10 86 5.6 Rc 1/8 M6 x 1.0 M6 x 1.0 M10 x 1.0 10 31 130 7 10 11 60 100 86 10 M14 x 1.5 Rc 1/8 M6 x 1.0 39 10 M8 x 1.25 11.5 120 160 12 70 15 100 9.2 Rc 1/8 M10 x 1.5 M8 x 1.25 M20 x 1.5 17 47.5 190 9.2 12 10.5 90 140 136

Table of Contents

Size: 10, 15 90 L CDRB2 10 WU F 180 S With auto switch Size: 20, 30, 40 CDRB2 20 WU B 180 S R73 L Number of auto switches With auto switch (With switch unit) Size S Nil 1 pc. 20 30 40 With angle adjuster 2 pcs.

Integrated Controller

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/10 = 0.03 [s], T3 = V/a2 = 300/10 = 0.03 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

10 actuators have different L dimensions for single and double vane.

Vacuum Unit

VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Size: 10, 15 90 L CDRB2 10 WU F 180 S With auto switch Size: 20, 30, 40 CDRB2 20 WU B 180 S R73 L Number of auto switches With auto switch (With switch unit) Size S Nil 1 pc. 20 30 40 With angle adjuster 2 pcs.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15