Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st 1 600 st 400 st 500 st st: Stroke (mm) 0.5 100 st 200 st 300 st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM100Stroke 4 (Slide bearing type) 3.5 3 1300 st Deflection Y (mm) 2.5 1200 st 1100 st 2 1000 st 1.5 900 st 800 st 1 600 st 700 st st: Stroke (mm) 400 st 500 st 0.5 100 st 200 st 300 st 0 0 100 50 150 200 250 300 350 400 450 500 550 600 650 700 750

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 750, Max. Transportable Mass Range (Horizontal)(kg): 20.1 to 50.0, Max. Transportable Mass (Horizontal)(kg): 30, Max. Transportable Mass Range (Vertical)(kg): 2.1 to 5.0, Max.

Protocol: P (PROFINET®), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Protocol: PROFINET®, Mounting: Screw Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: Basic Type, Body Size: 50, Max Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: -

Element Material: S (Stainless Steel 316), Element Size: 300 (ø65 x â„“750), Nominal Filtration Accuracy: 2 μm, Element Seal Material: V (FKM)

Element Material: B (Bronze), Element Size: 300 (ø65 x â„“750), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR)

Element Material: B (Bronze), Element Size: 300 (ø65 x â„“750), Nominal Filtration Accuracy: 100 μm, Element Seal Material: N (NBR)

Element Material: S (Stainless Steel 316), Element Size: 300 (ø65 x â„“750), Nominal Filtration Accuracy: 10 μm, Element Seal Material: V (FKM)

Element Size: 300 (ø65 x â„“750), Nominal Filtration Accuracy: 5 μm, Element Seal Material: N (NBR)

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 10 (1), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [â„“750 (â„“250 x 3)], Port Size R: 20 (2), Element Type: Vessel Replacement Only, Nominal Filtration Accuracy: Vessel Replacement Only, Element Seal Material: Vessel Replacement or Fiber Element Types Only

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G1 [G46-10-02M (Brass at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 10 (1), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only

Material: L (Body: Stainless Steel 304; Gasket/O-ring: FKM), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

Material: S (Body: Stainless Steel 304; Gasket/O-ring: NBR), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 10 (1), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only