KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.
20 D 3 5 Y Hexagon width across flats 16 ZX 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 ZR Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 ZM 3 C C ZH ZU 2 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
20 D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25
Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow
I 3 Width across flats 10 J Applicable tube O.D.
AS2001F-03 AS2001F-06 13 28.7 33.7 6.3 44.8 11.6 6 13.5 11.8 18 28.6 33.6 6.2 50 11.4 16.5 3/16" AS2001F-05 AS2051F-06 26 30.2 35.2 6.7 53.2 12.8 6 17 14.8 21 29.5 34.5 7.1 52.2 13.2 17 1/4" AS2001F-07 AS2051F-08 31 31.5 36.5 8.1 59.8 15.2 8 18 24 29.6 34.6 6.2 52.2 11.4 16.5 3/16" AS2051F-05 AS3001F-06 18 33.3 38.3 7.4 59 12.8 6 17 14.8 26 30.5 35.5 7.1 54.4 13.2 17 1/4" AS2051F-07 AS3001F
Note) 4 6 8 10 12 23 04 06 08 10 12 3.2 TMH-23J TMH-04J TMH-06J ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F AK TMH-06 TMH-08 ASS TMH-10 TMH-12 Applicable tubing Inch Size ASR Note) Mounting bracket is not available. This is an application example. Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.
Note) 4 6 8 10 12 23 04 06 08 10 12 3.2 TMH-23J TMH-04J TMH-06J ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F AK TMH-06 TMH-08 ASS TMH-10 TMH-12 Applicable tubing Inch Size ASR Note) Mounting bracket is not available. This is an application example. Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.
1 S 2 0 3 1 T 2 Q K 7 1 7 . 1 2 7 1 8 2 5 . 1 3 5 . 6 3 2 2 9 4 3 2 / 1 8 / 3 S 3 0 3 1 T 2 Q K 5 . 3 3 5 . 8 3 6 . 9 3 4 2 / 1 S 4 0 3 1 T 2 Q K 2 2 5 . 7 3 0 4 9 6 32 Series KQ2 One-touch Fittings Union tee: KQ2T Inch e l b a c i l p p A .
shield plate) CDQ2 MY1B, MY1H MY1C, MY1M MXW MXF MXU MXS, MXQ CDQS MK MK2 CY1R MXP MTS DC() Blue(Black) 5.5 5.5 6.5 5.5 6.5 4 8.5 4 3 5.5 4 4 4 5 6.5 6 4 D-F9B(V) 5.5 3 2 3 2.5 OUT(+) Brown(Red) 3 2 3.5 6 5 6 5.5 2.5 3 3 3 Switch main circuit 5.5 5.5 5.5 6.5 4 5 7 3 5 OUT() Blue(Black) 3 3 5 5.5 5.5 5.5 Note) Average value at normal temperature including hysteresis.
Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output
8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 CHN CHM CHS CHS CH2 CHA !0 q w !2 !
VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.
VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.
center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.
SV1000 3 position 73 (.16) (B) 2 (A) 4 4 position dual 3 port 71 (.15) SOL.b SOL.a Single solenoid 74 (.163) 3 (EB) 5 (EA) Double solenoid 78 (.17) SV2000 1 (P) 3 position 83 (.18) 4 position dual 3 port 78 (.17) 4 position dual 3 port valve: N.C./N.O.
AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11
SOL.b SOL.a 3(EB) 5(EA) 1(P) Conventional tie-rod base type manifolds are also available. 34 pins connector allows up to 16 stations with double solenoids. 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specifications is not available for 4 position dual 3 port valves. 3(EB) port 5(EA) port 4(A) port B side coil 2(B) port 1(P) port 1-2-2 1-2-3 3 Series
3/4 1 Thread type ON-flow range Note 1) IF30 is available for 06.