51 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 12 12.5 11 10.5 15 15 17 20 6 7 7.5 7.5 12 12 16 16 20 23 23 29 35 35 44 44 4 4 4 5.5 8 8 9.5 9.5 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 M5 x 0.8 M10 x 1.25 Rc1/8 Width across
(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8
4 M5 Connection diameter Low torque Rotary joint (Metal seal type) M5 M5 x 0.8 Number of circuits 1 circuit 2 circuits 4 circuits 8 circuits 12 circuits 1 2 4 8 12 Options N/A Standard type FNote) Flange type Note: No flange type in 1 circuit system Options / Mounting bracket Number of circuits Flange part number 2 circuits MQR2-F 4 circuits MQR4-F 8 circuits MQR8-F 12 circuits MQR12-F Specifications
(mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175 173 163 ZZ M6 x 1 depth 12 M5 x 0.8 depth 8 M5 x 0.8 depth 7.5 M4 x 0.7 depth 7 J 27 19.5 19.5 15.5 AL Bore size A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 44 35.5 29 24 NA 1/8 1/8 1/8<M5 x 0.8> 1/8<M5 x 0.8> P 9 7 7 7 RA 87 95 93 93 S 6 5.5 5.5
6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Port Thread: M5 Female Rod End Bore size
F = one finger thrust.
IRV 1 to 4 V 67 k 6 0 to 7.5 V 10 k 7 4 to 16 mA 120 8 0 to 15 mA 12 V VEX SRH Body size Port size Rc Option Mounting Symbol Symbol Port 1(P), 2(A) Port 3(R) B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Applicable pilot valve (4) SRP D 00 Without sub-plate M5 M5 SRF B 00 Without sub-plate M5 M5 01 18 ITV 2 00 Without sub-plate 01 18 02 14 Base mounted IC VY1D0-X39 (5) 00 Without
(inch) Thread UNF NPT UNF, M5, M6 10-32 UNF, M5, M6 Weight (g) H (Hex.)
Calculation example Calculation for allowable external force (with moment load) When static load f = 10 N, which produces pitch moment to the point L = 30 mm from MRHQ16D guide, is applied. Operable condition requires that F be bigger than f.
'i,-.1-)^' l z N F Noz l!
ID AMG Accessory (Option) HAA7 HAA7 HAA15 HAA22 HAA37 Auto-drain Applicable model AFF Working Principle HAA7-F HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F HAA22-S HAA37-F AD402-04 Dust-protecting filter Mounting bench AM HAA37-S Inlet side air (HOT AIR) Push button switch Pilot light The accessories should be mounted by user. Misc.
SZ3 60 LOZ Manual override E Nil D Non-locking push type A B C D Push & turn locking type, screw driver operated E F F A, B port size Type of valve actuation Rated voltage COM specifications Pilot system A B C 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Mixed 2 position single solenoid 2 position double solenoid 3 position closed center 3 position exhaust center 3 position pressure
A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.
Please contact SMC regarding other chemicals. 724 Air Cylinder CG1-Z 2122CG1-Z/ 1011Basic (B): CG1B, CG1B 10112122With rubber bumper Rod side air port Relief port M5 x 0.8 Head side air port Relief port GA Width across flats KA 2 RA 2 x Rc P GB 1 H1 MM R0.4 D 0 E0.05 0 E0.05 I C R0.4 Width across flats B1 AL K C 8 x J F A NA H S + Stroke F ZZ + Stroke Female rod end MM Thread depth A1 H ZZ
Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
M5 X 0.8 (Finger opening port) 22.5 2.3 19 Series MHK2 Wedge Cam Operation Gripper Dimensions MHK2-20 /Standard model Scale: 37% (mm) 18.6 20 2-M5 X 0.8 thread 8 deep 4H9 4 deep +0.030 0 21H9 1.5 deep +0.052 0 2-M5 X .8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia.4.3 through-hole 0 -0.1 8 Open 26 +1.2 0 5 13.5 16 0.02 60 58 32 42 30 0 -0.2 Closed 16 29 4H9 4 deep +0.030 0 21
) VPA VPA 1P 3R 32 3 NO 7 VPA3 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x
, 40 AW10 to 40 AW10 to 40 AW30, 40 AW10 to 40 Symbol 1 2 6 8 C J N R W Z Note 5) Body size 10 20 30 40 Thread type Note 6) Metric thread (M5) Rc NPT G Nil N Note 1) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) F Note 2) Note 7) When more than one specification is required, indicate in alphanumeric order.