RSQ

x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 Note) CX Round bar, Chamfered, Roller 1.03 1.07 1.11 50 Lever with built-in shock absorber 1.26 1.30 1.34 CY 7 MQQ M Courtesy of Steven

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASD230F-M5-04D-X12 744 ASDF-D Series Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting How to Order ASD 3 3 0 F 01 06 S D Made to Order Lubricant: Vaseline X12 AS-F Ex.)

CQS

x 35l x 40l x 45l x 50l M5 x 55l x 60l x 65l x 70l x 75l x 80l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l 6.5 10 6.5 7 10 Note) When mounting a cylinder with through-hole, be sure to use the attached plain washer.

51

70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 12 12.5 11 10.5 15 15 17 20 6 7 7.5 7.5 12 12 16 16 20 23 23 29 35 35 44 44 4 4 4 5.5 8 8 9.5 9.5 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 M5 x 0.8 M10 x 1.25 Rc1/8 Width across

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Low torque Metal seal type Rotary joint

4 M5 Connection diameter Low torque Rotary joint (Metal seal type) M5 M5 x 0.8 Number of circuits 1 circuit 2 circuits 4 circuits 8 circuits 12 circuits 1 2 4 8 12 Options N/A Standard type FNote) Flange type Note: No flange type in 1 circuit system Options / Mounting bracket Number of circuits Flange part number 2 circuits MQR2-F 4 circuits MQR4-F 8 circuits MQR8-F 12 circuits MQR12-F Specifications

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

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SMC Pneumatic Clean Series

(mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175 173 163 ZZ M6 x 1 depth 12 M5 x 0.8 depth 8 M5 x 0.8 depth 7.5 M4 x 0.7 depth 7 J 27 19.5 19.5 15.5 AL Bore size A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 44 35.5 29 24 NA 1/8 1/8 1/8<M5 x 0.8> 1/8<M5 x 0.8> P 9 7 7 7 RA 87 95 93 93 S 6 5.5 5.5

1

6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Port Thread: M5 Female Rod End Bore size

Wedge Cam Operation Provides

F = one finger thrust.

E-P HYREG

IRV 1 to 4 V 67 k 6 0 to 7.5 V 10 k 7 4 to 16 mA 120 8 0 to 15 mA 12 V VEX SRH Body size Port size Rc Option Mounting Symbol Symbol Port 1(P), 2(A) Port 3(R) B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Applicable pilot valve (4) SRP D 00 Without sub-plate M5 M5 SRF B 00 Without sub-plate M5 M5 01 18 ITV 2 00 Without sub-plate 01 18 02 14 Base mounted IC VY1D0-X39 (5) 00 Without

Rotary One-touch Fittings Series KS/KX

(inch) Thread UNF NPT UNF, M5, M6 10-32 UNF, M5, M6 Weight (g) H (Hex.)

MRHQ

Calculation example Calculation for allowable external force (with moment load) When static load f = 10 N, which produces pitch moment to the point L = 30 mm from MRHQ16D guide, is applied. Operable condition requires that F be bigger than f.

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Table of Contents

ID AMG Accessory (Option) HAA7 HAA7 HAA15 HAA22 HAA37 Auto-drain Applicable model AFF Working Principle HAA7-F HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F HAA22-S HAA37-F AD402-04 Dust-protecting filter Mounting bench AM HAA37-S Inlet side air (HOT AIR) Push button switch Pilot light The accessories should be mounted by user. Misc.

SZ3000

SZ3 60 LOZ Manual override E Nil D Non-locking push type A B C D Push & turn locking type, screw driver operated E F F A, B port size Type of valve actuation Rated voltage COM specifications Pilot system A B C 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Mixed 2 position single solenoid 2 position double solenoid 3 position closed center 3 position exhaust center 3 position pressure

E-P HYREG ® Series VY1 1

A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Please contact SMC regarding other chemicals. 724 Air Cylinder CG1-Z 2122CG1-Z/ 1011Basic (B): CG1B, CG1B 10112122With rubber bumper Rod side air port Relief port M5 x 0.8 Head side air port Relief port GA Width across flats KA 2 RA 2 x Rc P GB 1 H1 MM R0.4 D 0 E0.05 0 E0.05 I C R0.4 Width across flats B1 AL K C 8 x J F A NA H S + Stroke F ZZ + Stroke Female rod end MM Thread depth A1 H ZZ

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K