CQ2

8 Rc (PT) 1/8 Rc (PT) 1/4 8 8 10 55.5 62 77 30 30 39 16 16 20 13 13 15 12 12 11 Depth 8 Refer to p.2.3-18 for rod end nut and option bracket.

CRB2/CRBU2/CRB1

W1 = L3 = L1 = 10 10 4.5 to 14 0.5 to 2 Y-1 L2-1 6.5 to 14 X-3 L1-1 0.5 to 2 L4 = 15 15 Y = 5.5 to 18 Y-1.5 L2-1 0.5 to 2.5 X-4 L1-1 8 to 18 0.5 to 2.5 L2 = 20 20 Y-1.5 L2-1 6 to 20 0.5 to 3 9 to 20 X-4.5 L1-1 0.5 to 3 X = 30 30 0.5 to 4 Y-2 L2-2 8.5 to 22 0.5 to 4 X-5 L1-2 11.5 to 22 W2 = 40 40 0.5 to 5 Y-4.5 L2-2 13.5 to 30 0.5 to 5 15.5 to 30 X-5.5 L1-2 29 Series CRB2 Axial: Top (Long-shaft

Table of Contents

17 22.5 20.5 17.5 25 21.5 19.5 11.11 14.29 11.11 14.29 12.7 14.29 1 8 15.5 2.5 1 4 1 8 Applicable tubing 5 32 16 3 1 4 1 8 1 4 3 16 16 3.5 K 1 8 14.29 1 4 3 8 17 4.6 1 4 17.46 M Connection thread 1 8 15.5 20.5 14.29 1 4 3 8 5 16 18.5 6 H 13.5 17.46 30 16 19 1 4 17.46 22 28 D 3 8 1 2 3 8 21 7 14 22 22.23 30 33 22.5 24 28.5 30 MS 1 4 9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

0.05 0.05 0.05 0.05 0.05 Mounting 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Non-rotating Accuracy 1.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 (30) MSQ 3 MRQ D202 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

ZP

Thread dia. 4, 6 tube 4, 6 tube 4, 6, 8 tube 6, 8 tube M8 x 1 Male thread 10 to 16 20 to 32 40, 50 M10 x 1 Male thread M10 x 1 Male thread M14 x 1 Male thread Rotating (J)/Non-rotating (K) Buffer type For 2 to 8 6, 10, 15, 25 mm For 10 to 32 10, 20, 30, 40, 50 mm For 40, 50 10, 20, 30, 50 mm Buffer stroke Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6,

1

35 30 30 30 35 Non-rotating rod type Low friction type End Lock type 159 + 1/2 stroke 159 + 1/2 stroke 173 + 1/2 stroke 190.5 + 1/2 stroke 190.5 + 1/2 stroke 230.5 + 1/2 stroke 248 + 1/2 stroke 147.5 + Stroke 145 + Stroke 156.5 + Stroke 177 + Stroke 177 + Stroke 217 + Stroke 232 + Stroke 148 + Stroke 145.5 + Stroke 157 + Stroke 177.5 + Stroke 177.5 + Stroke 217.5 + Stroke 232.5 + Stroke

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Table of Contents

30 35 23 23 25 72 86 114 33 37 55 1 1 1 2 17-3-78 9 The VX series will be revised shortly.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Stability of suction position,

1 o !1 i Component Parts r r No.

Made to Order

MGC series 20 to 50 MGC Series (mm) C port SZ + Stroke B Cushion valve (Width across flats WH) Front mounting flange Bore size (mm) GC GD SA SB W 1 W 2 A, B port A port W 2 W 1 A 20 25 32 40 50 30 30 21 9 50 87 30 30 C port D port 21 9 50 87 B port W 2 W 1 10 A' 25 30 23 9 52 91 20 20 24 8 59 99 Cushion valve (Width across flats WH) D port ZZ + Stroke A + Stroke B SB + Stroke B SA + Stroke

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

Table of Contents

/8 AR30 1/4, 3/8 AR40 AR40-06 3/4 AR50 3/4, 1 AR60 1 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR40-06 3/4 AR50 3/4, 1 AR60 1 1/4, 3/8, 1/2 1/4, 3/8, 1/2 Port size Port size How to Order How to Order AR 30 BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature Body size Body size For high pressure 25 30 40 50 60 20 25 30 40 50 60 X430 X440 Low temperature High

Auto Switch Guide

color Indication Type P. 8-30-42 Band, Rail, Tie-rod, Direct Mounting With Timer P. 8-30-47 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 8-30-49 Rail Mounting Wide Range Detection Type P. 8-30-50 Band Mounting Made to Order Specifications P. 8-30-52 Technical Data 1, 2 P. 8-30-55 8-30-1 2 SMC Auto Switch Variations Function Type Electrical

Auto Switch Guide

color Indication Type P. 8-30-42 Band, Rail, Tie-rod, Direct Mounting With Timer P. 8-30-47 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 8-30-49 Rail Mounting Wide Range Detection Type P. 8-30-50 Band Mounting Made to Order Specifications P. 8-30-52 Technical Data 1, 2 P. 8-30-55 8-30-1 2 SMC Auto Switch Variations Function Type Electrical

Auto Switch Guide

color Indication Type P. 8-30-42 Band, Rail, Tie-rod, Direct Mounting With Timer P. 8-30-47 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 8-30-49 Rail Mounting Wide Range Detection Type P. 8-30-50 Band Mounting Made to Order Specifications P. 8-30-52 Technical Data 1, 2 P. 8-30-55 8-30-1 2 SMC Auto Switch Variations Function Type Electrical

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 18 to 30 18 to 30 18 to 30 18 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2