Sensor Resolution: 30 μm, Stroke: 20mm, Actuator Cable Length: 5m, Controller: LATCA, PNP, I/O Cable Length: 5m, Controller Mounting: -

Sensor Resolution: 1.25 μm, Stroke: 50mm, Actuator Cable Length: 3m, Controller: LATCA, PNP, I/O Cable Length: 1m, Controller Mounting: DIN Rail Mounting, DIN Rail not Included

Sensor Resolution: 30 μm, Stroke: 20mm, Actuator Cable Length: 3m, Controller: LATCA, NPN, I/O Cable Length: 1m, Controller Mounting: DIN Rail Mounting, DIN Rail not Included

Sensor Resolution: 30 μm, Stroke: 30mm, Actuator Cable Length: 3m, Controller: LATCA, PNP, I/O Cable Length: -, Controller Mounting: -

Sensor Resolution: 1.25 μm, Stroke: 30mm, Actuator Cable Length: 1m, Controller: LATCA, PNP, I/O Cable Length: 1m, Controller Mounting: DIN Rail Mounting, DIN Rail not Included

Sensor Resolution: 30 μm, Stroke: 30mm, Actuator Cable Length: 3m, Controller: LATCA, NPN, I/O Cable Length: 3m, Controller Mounting: -

Sensor Resolution: 1.25 μm, Stroke: 10mm, Actuator Cable Length: 1m, Controller: LATCA, NPN, I/O Cable Length: 5m, Controller Mounting: DIN Rail Mounting, DIN Rail not Included

Sensor Resolution: 30 μm, Stroke: 10mm, Actuator Cable Length: 1m, Controller: LATCA, PNP, I/O Cable Length: 1m, Controller Mounting: -

Sensor Resolution: 1.25 μm, Stroke: 10mm, Actuator Cable Length: 3m, Controller: LATCA, PNP, I/O Cable Length: 1m, Controller Mounting: -

Sensor Resolution: 1.25 μm, Stroke: 50mm, Actuator Cable Length: 1m, Controller: LATCA, PNP, I/O Cable Length: 1m, Controller Mounting: DIN Rail Mounting, DIN Rail not Included

Sensor Resolution: F (1.25 μm), Stroke: 30mm, Actuator Cable Length: 1m, Controller: AN (LATCA, NPN), I/O Cable Length: 1m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: 30 μm, Stroke: 10mm, Actuator Cable Length: 3m, Controller: AN (LATCA, NPN), I/O Cable Length: 5m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

Sensor Resolution: 30 μm, Stroke: 30mm, Actuator Cable Length: 3m, Controller: AN (LATCA, NPN), I/O Cable Length: 3m, Controller Mounting: D (DIN Rail Mounting, DIN Rail not Included)

New

+ Pa) 114.5 T1 $P : Pressure drop between the static pressure tapping ports [bar] P1 : Pressure of the upstream tapping port [bar gauge] P2 : Pressure of the downstream tapping port [bar gauge]: P2 = P1 $P Q : Flow rate [dm3/s standard condition] Pa : Atmospheric pressure [bar absolute] T1 : Upstream absolute temperature [K] Test conditions are P1 + Pa = 6.5 p0.2 bar absolute, T1 = 297 p5

High Vacuum Angle Valve

AS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Special AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Valve seal 1 w Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Special B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Valve seal 2 e Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V B2401-P10V Special B2401-P4 B2401-P5

High Vacuum Angle Valve

AS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Special AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Valve seal 1 w Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Special B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Valve seal 2 e Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V B2401-P10V Special B2401-P4 B2401-P5

ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.

Manifold Regulator Modular Type ARM2500/3000 Series

resistant NBR 3 2 Bracket A 1349161A 131515A Bracket Bracket 2 1 set Valve assembly Brass, HNBR 4 Bracket B 13639A 13649A 13 Hex. socket head cap screw Valve spring Stainless steel 5 136310 136410 2 KA00892 KA00904 12 Valve O-ring NBR 6 1 O-ring 11.5 x 8.5 x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked

Note 2)p5% F.S. (25oC reference)0 to 1 MPa1 MPa45 kPa or less at the maximum flow999999999 LBy 1 LNPN or PNP open collector output80 mA28 VDCNPN: 1 V or less (at 80 mA load current) PNP: 1.5 V or less (at 80 mA load current)0.5 s/1 s/2 sShort circuit protectionSelect from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.0.5 s/1 s/2 s (linked