Parallel I/O Type: N (NPN), I/O Cable Length: 1 m, Option: D (DIN Rail Mounting)

Parallel I/O Type: N (NPN), I/O Cable Length: 5 m

Parallel I/O Type: N (NPN), I/O Cable Length: 5 m, Option: D (DIN Rail Mounting)

Parallel I/O Type: P (PNP)

Parallel I/O Type: P (PNP), I/O Cable Length: 3 m, Option: D (DIN Rail Mounting)

Parallel I/O Type: P (PNP), I/O Cable Length: 1 m

Parallel I/O Type: N (NPN), I/O Cable Length: 3 m, Option: D (DIN Rail Mounting)

Parallel I/O Type: P (PNP), I/O Cable Length: 3 m

Parallel I/O Type: P (PNP), I/O Cable Length: 5 m

Table of Contents

1(PV)(PS PD) PD PE PS Table (2) PV Part no.

ZR

port M5 PE port Pilot valve exhaust port M5 PD port Non-locking push type Manual override Non-locking push type Manual override Vacuum release pressure port Vacuum release pressure port EXH EXH 109 PE PE PE PE PD PD PD PD 81.5 80.8 80.8 PD PD PD PD PS PS PS PS PV PV PV PV 52 52 13.5 13.5 50 42 42 PD PS PD PS 35.5 35.5 31.5 33 33 28 28 16.5 17 17 PV PV PV PV PV PV M5 PD port Release flow

Vacuum Unit

Common EXH port Common PS/PD ports Application ZZK2mA-Am1m Yes PS = PD Ejector common exhaust PV = PS = PD ZZK2mA-Am1m-D Yes PS PD Ejector common exhaust PV = PS PD Standard supply pressure 0 Ejector individual exhaust PV = PS = PD Supply pressure ZZK2mA-Am2m ZZK2mA-P2m None PS = PD Vacuum pump system PV PS = PD Operating Supply Pressure Caution Ejector individual exhaust PV = PS PD ZZK2mA-Am2m-D

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

15

[Provided by user] Motor PD (I.D.)

ZX

1(PV)(PS PD) PD PE PS Table (2) PV Part no.

4-channel Flow Monitor ( compatible)

0.00 to 3.70 PD 0 to 1000 0 to 1050 Flow L/min 0 to 200 0 to 210 200 L Flow gal/min 0.0 to 7.1 0. to 7.4 PD 0 to 1000 0 to 1050 Flow L/min 0 to 500 0 to 525 500 L Flow gal/min 0.0 to 17.6 0. to 18.6 PD 0 to 1000 0 to 1050 Flow L/min 0.40 to 4.00 0.25 to 4.50 4 L Flow gal/min 0.11 to 1.06 0.07 to 1.19 PD 100 to 1000 63 to 1125 Flow L/min 1.8 to 20.0 1.3 to 21.0 PF2D5 20L Flow gal/min 0.45

ZQ-OM01401

(PE) (2 ) (P) (2 ) (4 ) (PV) PS 1 PD PD 2 EXH 2 10 - No.ZQ-OM01401-B 3. 3.1 3.1.1 () 1) (2x3.2) 2) (0.54~0.66Nm) 2 3.1.2 () 1) (ZQ1-BK1-A) (2x 3.2) (4x3.2) 2)0.54~0.66Nm 4 3.1.3 1) () PD M3 / PD M4 2 (PD 0.28~0.34Nm / PD :0.68~0.83Nm (4 ) (4 ) 11 - No.ZQ-OM01401-B 3.1.4 1 2 3 3.2 1) 2) () 3) ZFC 4)( ) 5) 6)CE / UKCA CE / UKCA 7) 8) 9) 10) 11) 12) 12 - No.ZQ-OM01401

LEC-OM02704CN

) (PA) () 1 (PB) (PC) LECSC(PD) (LSPLSN) 15 35 15 15.5.5 (DWELL) 15.5.6 15 36 15 15.6 (37) CC-Link (1) ON ( 3 ) CC-Link ( 1 ) CC-Link ON CC-Link ( 3 ) *2 ON ( 3 ) 2 2 OFF 1. 2.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PD (Hexagon socket head plug) YH QQ PP QQ RR SS RR SS H NH NE NC PP TT TT GA GA UU UU Cushion needle M5 x 0.8 (Port) 2-M5 x 0.8 G G 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke

PSxx-OMV0008CN

0 1450.4 -73 1523 (PD) 1000 5000 800 5200 MPa 0 16.000 -0.80 16.80 kgf/cm 2 0 163.15 -8.2 171.3 bar 0 160.00 -8.0 168.0 ISE78G psi 0 2320.6 -116 2437 (PD) 1000 5000 800 5200 ISE70G MPa (PD) PD [MPa] (PD)(ISE70G MPa) -65No.PS-OMV0008CN-E Pr = a (PD) + b (PD) = (Pr b) / a Pr PD a b [] a b MPa 0.00025 -0.25 kPa 0.25 -250 kgf/cm 2 0.00254925 -2.54925 ISE70G bar 0.0025 -2.5