SZ3000

SZ3 60(R) X90 U side Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Entry is the same as standard products. Specifications and performance are the same as standard products.

Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimal dead space The diaphragm is supported by a buffer that minimizes deformation, which gives it long life and resistance to backpressure.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

ITV

Count AF Supply pressure: 1.0 MPa Pressure Characteristics Flow Characteristics Set pressure: 0.45 MPa AR 1000 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 900 kPa 900 Output deviation factor (% F .S.) 800 kPa IR 800 0.5 700 kPa Set pressure (kPa) 700 600 kPa

Bearing Type: M (Sliding Bearing), Stroke: 700mm, Motor Option: None, Switch Rail Option: R (w/Magnet/Switch Rail)

Bearing Type: M (Sliding Bearing), Stroke: 700mm, Motor Option: C (w/Motor Cover)

Bearing Type: M (Sliding Bearing), Stroke: 900mm

Bearing Type: M (Sliding Bearing), Stroke: 400mm, Motor Option: None, Switch Rail Option: R (w/Magnet/Switch Rail)

Bearing Type: M (Sliding Bearing), Stroke: 200mm, Motor Option: None, Switch Rail Option: R (w/Magnet/Switch Rail)

Bearing Type: M (Sliding Bearing), Stroke: 500mm, Motor Option: None, Switch Rail Option: R (w/Magnet/Switch Rail)

Bearing Type: M (Sliding Bearing), Stroke: 400mm, Motor Option: B (w/Lock), Switch Rail Option: R (w/Magnet/Switch Rail)

Bearing Type: M (Sliding Bearing), Stroke: 600mm, Motor Option: B (w/Lock), Switch Rail Option: R (w/Magnet/Switch Rail)

Bearing Type: M (Sliding Bearing), Stroke: 100mm, Motor Option: None, Switch Rail Option: R (w/Magnet/Switch Rail)

Bearing Type: M (Sliding Bearing), Stroke: 200mm

Bearing Type: M (Sliding Bearing), Stroke: 200mm, Motor Option: C (w/Motor Cover)

Bearing Type: M (Sliding Bearing), Stroke: 400mm

Bearing Type: M (Sliding Bearing), Stroke: 400mm, Motor Option: C (w/Motor Cover)

Bearing Type: M (Sliding Bearing), Stroke: 400mm, Motor Option: B (w/Lock)

Bearing Type: M (Sliding Bearing), Stroke: 500mm