Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 300, Max. Transportable Mass Range (Horizontal)(kg): 0 to 2.0, Max.

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 300, Max. Transportable Mass Range (Horizontal)(kg): 5.1 to 10.0, Max.

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 300, Max. Transportable Mass Range (Horizontal)(kg): 10.1 to 20.0, Max.

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 300mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard

Bearing Type: L (Ball Bushing Bearing), Stroke: 300mm, Motor Option: None, Switch Rail Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 3

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: U (Bottom Mounting), Stroke: 300, Motor Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m)

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m)

Size: 16, Motor Mounting Position: D (In-line Type), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m)

Series: LEFB (Belt Drive), Size: 16, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m)

Series: LEFB (Belt Drive), Size: 25, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m)