4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

CJ2X/CUX/CQSX/CQ2X/CM2X

12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) No rubber bumper Rubber

CJ2X/CUX/CQSX/CQ2X/CM2X

12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) No rubber bumper Rubber

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1CW MY1CW/m3 MY1CW/m2 MY1CW/m1 30 200 20 100 100 10 50 40 50 40 5 30 30 MY1CW63 MY1CW63 MY1CW63 4 Load weight (kg) Load weight (kg) Load weight (kg) 20 20 MY1CW50 MY1CW50 MY1CW50 MY1CW63 MY1CW63 MY1CW63 3 MY1CW40 MY1CW40 MY1CW40

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1CW MY1CW/m3 MY1CW/m2 MY1CW/m1 30 200 20 100 100 10 50 40 50 40 5 30 30 MY1CW63 MY1CW63 MY1CW63 4 Load weight (kg) Load weight (kg) Load weight (kg) 20 20 MY1CW50 MY1CW50 MY1CW50 MY1CW63 MY1CW63 MY1CW63 3 MY1CW40 MY1CW40 MY1CW40

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

For details, refer to page 6-16-39. 6-9-20 21 Air Cylinder: Standard Type Double Acting, Double Rod Series CS1W Lube, Non-lube: 125, 140, 160, 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CJ1 Without auto switch L 125 100 JJ CS1W CJP CJ2 L 125 100 JJ Y7BW CDS1W With auto switch CM2 Number of auto swithes Built in magnet CG1 Nil 3 S n 2 pcs. 3 pcs. 1 pc. n pcs.

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

C95

2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 6-12-28 29 Series C95N Specific Product Precautions 1 Be sure to read before handing.

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

C95

] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000

SQ1000/2000

check valve (-B) SSQ2000-BP Built-in silencer (-S) P. 100 P. 99 P. 101 P. 103 C8 L8 Terminal number D-sub connector SOL.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10 8-29-23 24 Dual Rod Cylinder: Double Rod Type Series CXSW 6, 10, 15, 20, 25, 32 How to Order Y7BW CXS W L 100 S 20 Nimber of auto switches Double rod type Nil S n 2 pcs. 1 pc. n pcs.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Piston speed mm/s Load weight/MY2H (Single axis) MY2H/m1 MY2H/m2 MY2H/m3 60 50 60 60 50 50 30 30 30 20 20 20 Load mass kg Load mass kg Load mass kg MY2H40 MY2H40 MY2H40 10 10 10 MY2H25 MY2H25 MY2H25 5 5 5 4 4 4 3 3 3 MY2H16 MY2H16 MY2H16 2 2 2 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 Piston speed mm/s

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MGZ R 100 40 Z Z73 Number of auto switches Without non-rotating mechanism Nil S 2 pcs. 1 pc.

SYJ3000/5000/7000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

MHZ

100 150 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.