Interface Regulator for VQ4000 5 Port Solenoid Valve 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure
0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200
1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure
Series: LEKFS, Size: 16, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C61 (JXC61, Parallel I/O), Controller Mounting: 7 (Screw Mounting), Communication
Series: LEFB, Size: 32, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: T (48mm), Stroke: 500mm, Motor Option: B (w/Lock), Auto Switch Compatibility: C (with Includes 1 Mounting Bracket), Grease Application: With, Positioning Pin Hole: K (Body Bottom 2 Locations), Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 7 (Screw Mounting), I/O Cable
Series: LEFB, Size: 32, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: T (48mm), Stroke: 2000mm, Motor Option: B (w/Lock), Auto Switch Compatibility: C (with Includes 1 Mounting Bracket), Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (Body Bottom 2 Locations), Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 7
Series: LEFS, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R3 (3m), Controller:
Size: 40, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 30mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 7 (Screw Mounting), I/O Cable: 3 (I/O Cable, 3m)
Size: 40, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 30mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 7 (Screw Mounting), I/O Cable: 3 (I/O Cable, 3m)
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic
Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 250mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 3 (3m), Controller Type for (LEC, JXC): C61 (JXC61, Parallel PNP, Step
Table Accuracy: Basic, Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O Cable Length for LEC:
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 250mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 500mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 250mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable