, 400, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

, 400, 500600, 700, 800, 9001000501510001000100094076062052020,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing

A

, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Fluid Air Proof Ppressure 1.5MPa / 214PSI Max Operating Pressure 1.52MPa

NCA1

9 Carbon steel @0 How to Order Seal Kit NCA1 W 150 PS Option Option -XB5 Oversized rod -XB6 High temperature -XB7 Low temperature -XC11 Dual operation/Single rod Bore W K Single rod Double rod Non-rotating 150 200 250 325 400 Available for 150, 200 and 250 bores only. Use single rod designation when ordering XC11 kit. Note: XC10 seal kit order 2 single rod kits.

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin arrangement CS1 3 4 4 3 3 C76 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300 m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand

Thermo-con/Rack Mount Type

Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.

CY1

, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight IDF-TR7000-8 IDF100F 7 kVA Three360 540 400 260 300 11 30 94 kg IDF-TR9000-8 IDF125F, 150F 9 kVA 400 650 450 300 350 13 40 109 kg IDF-TR14000-8 IDF190D, 240D 14 kVA 400 650 450 300 350 13 40 152 kg IDF-TR18000-8 IDF370D 18 kVA 400 650 450 300 350 13 40 179 kg 220, 240, 380, 400, 415, 440 V (50/60 Hz) phase

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Compact 5-Port Solenoid Valve

500 600 700 800 6 CJ2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 60 mm 10 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 63 80 0 100 200 300 400 500 600 700 800 Average speed [mm/s] * Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle

Air Cylinder NCQ7 Series Compact Cylinder

Boro 106 (1116") 400 (4") Auto switch installation.

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Boro 106 (1116") 400 (4") Auto switch installation.

Digital Flow Switches

Mount switches in locations where there is no vibration greater than 98m/s2, or impact greater than 490m/s2. 3. Do not use in an area where surges are generated.

PF2A/PF2W

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

Digital Flow Switches, Series PF2A, Series PF2W

10 to 500Hz at whichever is smaller: 1.5mm amplitude or 98m/s2 acceleration in X, Y, Z directions for 2 hrs. each Vibration resistance 490m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000Vp-p, Pulse width 1s, Rise time 1ns Weight Note 3) 410g 470g 650g 1,100g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W3

HRL

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 HRSH090 Inverter type 0.1 5 to 40 Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 (400 V as standard, 200 V as an option) (Only 200 V as an option) CH1 0.1 15 to 25 HRL Inverter dual type 26 kW Indoor use

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

Power Clamp Cylinder

North America For Europe For France Special Maximum clamping force (lbf) Maximum clamping force (N) 8000 2000 7000 6000 1500 80 80 5000 4000 1000 63 63 3000 40 50 2000 500 50 1000 40 0 0 5 10 15 20 0 450 400 350 300 250 200 150 100 50 0 Arm length L (mm) Arm length L (in) Allowable load for clamp arm end Refer to the graph on pages 190 and 191 for parts weight of the arm.

LEY-OM007

30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.17 1.24 1.41 1.67 1.85 2.02 2.20