High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

CNG

NDH10 MM MM MM NDH10 MM L L R1 R1 R1 R R R1 R R E1 E1 E1 E1 U1 NX NX A1 U1 A1 L1 U1 A1 NX U1 A1 L1 NX L1 NZ A L1 A NZ A A ND Part no. Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable A Applicable bore size (mm) MM R1 U1 NDH10 NX R1 R Part no. R pin part no.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

CJ5-S

Applicable bore size (mm) CX Applicable snap ring Applicable snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l + 0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 Type C 3.2 Type C 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 CY 0.030 0.060 0.030 0.060 + 0.048 0 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 Type C 5 Type C 5 8 25

CJ5-S

Applicable bore size (mm) CX Applicable snap ring Applicable snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l + 0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 Type C 3.2 Type C 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 CY 0.030 0.060 0.030 0.060 + 0.048 0 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 Type C 5 Type C 5 8 25

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Modular F.R.L. Units

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR

CV/MVGQ

MQQ M RHC 3.

CV/MVGQ

3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

S Couplers Series KKH

Dimensions/Socket (S) Male thread type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

VK3000

For details, refer to the page 3-2-4.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

Vacuum Saving Valve

Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

PSE57  Series Pressure Sensor for General Fluids

lead wire and M12 connector 175 g 182 g 191 g 3 A

5 Port Solenoid Valve Series SY3000/5000/7000/9000

P) 3 position pressure center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3(EB) 1(P) 5(EA) (This figure shows a closed center type.)

Table of Contents

3 3 3 MHY MHW MRHQ Direct mounting type Misc.

SX

ground Type 3 ground Type 3 ground Type 3 ground b) 3-wire type Wiring with signal ground line (SG) Master unit Slave unit 01 Slave unit 03 Slave unit 75 Type 3 ground Type 3 ground Type 3 ground Type 3 ground Twisted pair with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-6-113 114 Type SF1 NKE Corporation Uni-wire System Type SJ1, SJ2 SUNX Corporation S-LINK System Type

Vacuum System Peripherals:

17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve Series VT VT325/307/317 to 1 8 3 8 Vol. 4 0.63 to 5.5 3 port solenoid valve Series VP VP300/500/700 to Vol. 4 1 8 1 2 2.9 to 15 3 port solenoid valve Series VS to Vol. 4 1 8 3 4 3.8 to 20 3 position valve Series

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.