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Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 2.7) A part z1 r1 = 37 (mm) Calculation of weight m1 = a x b x c x Specific gravity m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Moment of inertia around Z1 axis IZ1 = {m1(a2 + b2)/12} x 10-6 Iz1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) IA = 0.8 x 10-6 + 0.006 x 372 x 10

Proper tightening torque Nm Connection thread size 7 to 9 NPT 1/16, NPT, R1/8 12 to 14 NPT, R1/4 22 to 24 NPT, R3/8 28 to 30 NPT, R1/2 2. When a fitting is over tightened, more of the sealant material is squeezed out. Remove the squeezed out sealant material. 3. When tightening is not sufficient, it will cause sealant failure or a loose fitting. 4.

Operating model: MHY2-16D Opening time: 0.15s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d Material of attachment: Aluminum alloy (Specific gravity = 2.7) r1 = 37 (mm) z r1 Calculate the moment of inertia of attachment.

Series CBQ2 Dimensions Standard type (through hole type)/CBQ2B, CDBQ2B (mm) With double end taps With double end taps: CBQ2A, CDBQ2A Bore size (mm) R1 R1 O1 thread R1 O1 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 63 M10 x 1.5 18 DL With rear lock End lock mechanism (locking type manual release) LL 4 through H effective thread depth C 11 24 2 x 4O counter bore depth R End lock mechanism

SUS630SUS304 () * (14 ) FG (49 N () () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal

fluid temperature [C] Circulating fluid temperature [C] HRSE018-A-20/23-(T) [50 Hz] [60 Hz] 2000 2000 Ambient temperature Ambient temperature 25C Cooling capacity [W] Cooling capacity [W] 25C 1500 1500 35C 1000 1000 35C 500 500 40C 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient

Stations L n 2 173 162.5 145.6 13.5 109 3 198 187.5 169.6 14 133 4 223 212.5 193.6 14.5 157 5 248 237.5 217.6 15 181 6 273 262.5 241.6 15.5 205 7 298 287.5 265.6 16 229 8 323 312.5 289.6 16.5 253 9 348 337.5 313.6 17 277 10 373 362.5 337.6 17.5 301 11 385.5 375 361.6 12 325 12 410.5 400 385.6 12.5 349 13 435.5 425 409.6 13 373 14 460.5 450 433.6 13.5 397 15 485.5 475 457.6 14 421 16 510.5 500

NFPA (Fluid) T2.24.1 R1: Hydraulic fluid power Systems standard for stationary industrial machinery. NFPA 79: Electrical Standard for Industrial Machinery. ANSI / RIA / ISO 10218 -1: Robots for Industrial Environment Safety Requirements Part 1 Robot. etc. Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

mm (For the ZNC80) The values are for when the connection is as follows: Fitting min. hole diameter: 4.5, Tubing size: 6 x 4, Length: 500 mm *4 No freezing or condensation.

0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min

600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01 ARJF310F-01

500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 1000 500 10 5 0 15 20 25 500 1000 1500 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min 858 Clean Regulator SRH Series Pressure Characteristics (Representative

Applicable bore size A1 L1 MM NDH10 NX R1 U1 Part no. Applicable bore size Dd9 d L L1 m t Included retaining ring Part no.

R1/4 8 to12 Internal circuit and wiring How to connect the body and the lead wire and connector Align the lead wire connector with the connector key groove, and insert vertically. Connection is complete when the knurled part is fully tightened. Check that the connection is not loose.

P3P CE08 R1/2 (PF1/2) conduit entry nipples M20x1,5 / R1/2 (ND9100 and ND9400) Not applicable with 5.sign "H" and "F". CE09 1/2 NPT conduit entry nipples Brass M20x1,5 / 1/2 NPT, Exd approved (ND9200) DRIVER SETS Driver sets including the needed parts when assembling ND9000 on rotary actuators with VDI/VDE 3845 attachment face or Neles standard mounting faces.

Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 37 (mm) r2 = 2.7) A part z1 m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Calculation of weight m1 = a x b x c x Specific gravity Moment of inertia around Z1 axis IZ1 = {m1(a2 + b2)/12} X 10-6 Iz1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) IA = 0.8 x 10-6 + 0.006 x 372 x 10

Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 37 (mm) r2 = 2.7) A part z1 m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Calculation of weight m1 = a x b x c x Specific gravity Moment of inertia around Z1 axis IZ1 = {m1(a2 + b2)/12} X 10-6 Iz1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) IA = 0.8 x 10-6 + 0.006 x 372 x 10