Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

VZS

-01 3 position closed center: VZS2350-KZ-01 3 position exhaust center: VZS2450-KZ-01 3 position pressure center: VZS2550-KZ-01 EVS VFN 132 (3 position: 142) (Lead wire length) 300 (Lead wire length) 147 (3 position: 157.5) 300 With light/surge voltage suppressor Other dimensions are the same as the grommet type.

Table of Contents

Threaded type from 6A to 50A is standardized.

SY

For SY5000 [SY5000-6A-01] [SY5000-6A-C6] Description No. Note Material Die-cast aluminum (SY3000 is die-cast zinc.)

2/3 Port Valve

Screw-in styles, 6A to 50A, are standardized.

Air Slide Table

MXQ 6A-Z Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc.

VDW

A G H LVC Stations C37 LVA For 2 stations For 3 stations OUT port size 1 2 Stainless steel LVH Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 LVD VVCW20 6A LVQ Material Pipe material Seal material NBR FKM NBR FKM Symbol Nil A G H LQ C37 Note) Consists of a set for D and U sides.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

How to Order Connector Assembly VQC VQZ SQ For 12, 24 VDC VFS For SY5000/7000 SY5000-37-3A Specifications For SY3000 For single solenoid SY3000-37-3A Double solenoid, 3 position type SY3000-37-4A VFR SY5000-37-4A Single with spacer assembly SY5000-37-3A VQ7 SY5000-37-5A Double, 3 position with spacer assembly SY3000-37-6A SY5000-37-6A For 100 VAC Specifications For SY3000 For single solenoid

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Type 30 Passage pipe assembly VVCW20 2 C 1 01 Types 10, 20 VVDW 2 0 6A Material Brass Stainless steel C S Thread type Materials Series Symbol Nil A G H Rc G NPT Nil F N Pipe material 1 2 10 20 Seal material NBR FKM NBR FKM Stations Brass For 2 stations For 3 stations OUT port size 1 2 Stainless steel Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 VVCW20 6A Materials Symbol Nil A G H Seal

VDW Series

Type 30 Passage pipe assembly VVCW20 2 C 1 01 Types 10, 20 VVDW 2 0 6A Material Brass Stainless steel C S Thread type Materials Series Symbol Nil A G H Rc G NPT Nil F N Pipe material 1 2 10 20 Seal material NBR FKM NBR FKM Stations Brass For 2 stations For 3 stations OUT port size 1 2 Stainless steel Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 VVCW20 6A Materials Symbol Nil A G H Seal

42

However, the maximum number of stations is 16. 1B 2A 2B 3A 3B 4A VFR 4B 5A 5B 6A 6B 7A 7B VQ7 1.

SQ1000/2000

B (+) () 1B 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM SOL. A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 2 SOL. B (+) () 2B SOL. A (+) () 3A Station 3 SOL. B (+) 3B () SOL. A (+) 4A () Station 4 SOL. B 4B (+) () SOL. A (+) () 5A Station 5 SOL. B (+) 5B () SOL. A (+) () 6A Station 6 SOL. B 6B (+) () SOL.

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

Process Valve

Screw-in type (6A to 50A) and the flange (32F to 50F) are standardized.