ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Table of Contents

1, Metal joint q, w, Gasket A e, Guard !3 !1 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

One-touch Fittings Series KQ2

8 / 3 S 3 0 7 0 T 2 Q K 7 1 5 . 9 2 0 3 5 3 8 / 1 S 1 0 9 0 T 2 Q K 2 1 2 . 5 1 2 1 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 T 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 T 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 T 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 T 2 Q K 5 . 1 3 5 . 4 3 8 3 2 / 1 S 4 0 1 1 T 2 Q K 2 2 5 . 5 3 5 . 6 3 4 6 4 /

AC

Note 2) Without valve mechanism. q 00 10 20 30 40 e w w q w q q w e q w (1) Numbers in K indicate the constructing order from the left hand side (upper stream) with a view from front. Ex.) Symbol 00 AF+AR+AL 10 AW+AL (Available only for AC1010 to 4010.) 20 AF+AR 30 AF+AFM+AR (Available only for AC2030 to 4030.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

NPT1/2 C J E IN A 2 x Port size 1(IN), 2(OUT) port B [mm] Size Port size A B C D E F 20 1/4 28.1 40 69 36 12.5 18 3/8 48 G3/8 72 14 30 1/4 28.1 40 78 42 12.5 21 3/8 48 G3/8 81 14 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/4 39 28.5 44.8 38 46.4 48.9 3/8 G3/8 42 47.8 49.4 30 1/4 40 31.1 45.8 41 47.4 51.9 3/8 G3/8 43 48.8 50.4 17 Direct Operated 2-Port Solenoid Valve

7

3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

JIS Standard Hydraulic Cylinder

0 @3 w @5 q i @8 t y @7 @2 @0 !2 !5 !4 CHQ CHK CHN CHM CHS CH2 CH2 !3 @1 #1 #3 #2 u o @9 e r @6 @4 !1 CHA Related Products DParts List Replacement Parts: Seal Kit Description Material Note Bore size (mm) Seal kit no. Content No.

New

Stainless 1/8 3/32 2.4 steel 1/8 3.2 B Grommet 100 VAC With surge voltage suppressor C 110 VAC B C D E F 3/32 2.4 1/8 1/8 3.2 D 200 VAC 3/32 2.4 E 230 VAC 1/8 3.2 1/4 F 24 VDC C37 5/32 4 G DIN terminal 24 VDC G 7/32 5.6 With surge voltage suppressor J 1/8 3.2 H 100 VAC K L P Q R S T U 5/32 4 3/8 J 110 VAC Single 7/32 5.6 2 Size 2 Unit K 200 VAC 3/32 2.4 N.C. 1/8 L 230 VAC 1/8 3.2 3/32 2.4

Modular F.R.L. Unit

Specifications Applicable models Part number suffix X465 Model AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) Model ISE30---L Port sizes 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Set pressure range (MPa) 0.1 to 1 Pressure switch Set and display resolution (MPa) 0.001 Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection

Battery-less

3 i e !5 r t w q y !6 !

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

+ l GA 2-RcP 4-FD J R MM FY BB D E e Air release K F Width across flats G MA l C f Air release 10 NB NA FT A SS B SS + Q + l + Stroke S + Stroke FX H M ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 14 21 15 11 37 31 3/8 39 130 11 13 88 40 109 30 52 21.5 15 25 to 1400 1/

ZP

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300